Low stress die attachment

ABSTRACT

A system for resiliently attaching a mass to a package. The system includes a mass, a housing, resilient couplings for resiliently attaching the mass to the housing, bumpers for slidingly supporting the mass, and electrical connections for electrically coupling the mass to the housing.

This application claims the benefit of Provisional application Ser. No. 60/125,076 filed Mar. 17, 1999.

BACKGROUND OF THE INVENTION

The present disclosure relates generally to a method of attaching a mass to a package, and in particular to attaching a mass to a package in order to minimize stress.

In attaching a mass to a package, thermally induced contraction and expansion effects are created in the mass as well as other package stress effects. Elastomer or epoxy-based attach materials minimize thermally induced contraction and expansion effects but limit the shock withstanding of the mass and cannot facilitate vacuum sealing due to out gassing. Mechanical attachment processes minimize thermally induced contraction and expansion effects created in the mass, but are complex.

The present invention is directed at minimizing the thermally induced contraction and expansion stresses along with other stress effects in the mass and the housing, while providing good manufacturability and enabling a vacuum-sealing process.

SUMMARY OF THE INVENTION

An apparatus is provided that includes a package, a mass coupled to the package, and one or more resilient couplings for attaching the mass to the package.

A method of coupling a mass to a package is provided that includes resiliently attaching the mass to the package at one or more different locations.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a cross-sectional view illustrating an embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 1B is a top view of an embodiment of the apparatus of FIG. 1A.

FIG. 1C is a bottom view of an embodiment of the mass of the apparatus of FIG. 1A.

FIG. 1D is a top view of an embodiment of the resilient coupling of the apparatus of FIG. 1A.

FIG. 1E is a detailed view of the embodiment of the resilient coupling of FIG. 1D.

FIG. 1F is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 1A.

FIG. 1G is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1H is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1J is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1K is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1L is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1M is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1N is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1P is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 1A.

FIG. 1Q is a top view of an alternate embodiment of the resilient coupling of the apparatus of FIG. 1A.

FIG. 1R is a detailed view of the alternate embodiment of the resilient coupling of FIG. 1Q.

FIG. 1S is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 1T is a top view of an embodiment of the sliding supports of the apparatus of FIG. 1S.

FIG. 1U is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 1S.

FIG. 1V is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 1S.

FIG. 1W is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 1S.

FIG. 2A is a cross-sectional view illustrating an embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 2B is a top view of an embodiment of the apparatus of FIG. 2A.

FIG. 2C is a bottom view of al embodiment of the mass of the apparatus of FIG. 2A.

FIG. 2D is a top view of an embodiment of the resilient coupling of the apparatus of FIG. 2A.

FIG. 2E is a detailed view of the embodiment of the resilient coupling of FIG. 2D.

FIG. 2F is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 2A.

FIG. 2G is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2H is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2J is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2K is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2L is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2M is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2N is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2P is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 2A.

FIG. 2Q is a top view of an alternate embodiment of the resilient coupling of the apparatus of FIG. 2A.

FIG. 2R is a detailed view of the alternate embodiment of the resilient coupling of FIG. 2Q.

FIG. 2S is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 2T is a top view of an embodiment of the sliding supports of the apparatus of FIG. 2S.

FIG. 2U is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 2S.

FIG. 2V is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 2S.

FIG. 2W is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 2S.

FIG. 3A is a cross-sectional view illustrating an embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 3B is a top view of an embodiment of the apparatus of FIG. 3A.

FIG. 3C is a bottom view of an embodiment of the mass of the apparatus of FIG. 3A.

FIG. 3D is a top view of an embodiment of the resilient coupling of the apparatus of FIG. 3A.

FIG. 3E is a detailed view of the embodiment of the resilient coupling of FIG. 3D.

FIG. 3F is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 3G is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 3A.

FIG. 3H is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 3A.

FIG. 3J is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 3A.

FIG. 3K is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 3A.

FIG. 3L is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 3A.

FIG. 3M is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 3A.

FIG. 3R is a top view of an alternate embodiment of the resilient coupling of the apparatus of FIG. 3A.

FIG. 3S is a detailed view of the alternate embodiment of the resilient coupling of FIG. 3S.

FIG. 3T is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 3U is a top view of an embodiment of the sliding supports of the apparatus of FIG. 3T.

FIG. 3V is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 3T.

FIG. 3W is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 3T.

FIG. 3X is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 3T.

FIG. 4A is a cross-sectional view illustrating an embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 4B is a top view of an embodiment of the apparatus of FIG. 4A.

FIG. 4C is a bottom view of an embodiment of the mass of the apparatus of FIG. 4A.

FIG. 4D is a top view of an embodiment of the resilient coupling of the apparatus of FIG. 4A.

FIG. 4E is a detailed view of the embodiment of the resilient coupling of FIG. 4D.

FIG. 4F is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 4G is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 4A.

FIG. 4H is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 4A.

FIG. 4J is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 4A.

FIG. 4K is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 4A.

FIG. 4L is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 4A.

FIG. 4M is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 4A.

FIG. 4R is a top view of an alternate embodiment of the resilient coupling of the apparatus of FIG. 4A.

FIG. 4S is a detailed view of the alternate embodiment of the resilient coupling of FIG. 4R.

FIG. 4T is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 4U is a top view of an embodiment of the sliding supports of the apparatus of FIG. 4T.

FIG. 4V is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 4T.

FIG. 4W is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 4T.

FIG. 4X is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 4T.

FIG. 5A is a cross-sectional view illustrating an embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 5B is a top view of an embodiment of the apparatus of FIG. 5A.

FIG. 5C is a bottom view of an embodiment of the mass of the apparatus of FIG. 5A.

FIG. 5D is a top view of an embodiment of the first resilient coupling of the apparatus of FIG. 5A.

FIG. 5E is a detailed view of the embodiment of the first resilient coupling of FIG. 5D.

FIG. 5F is a top view of an embodiment of the second resilient coupling of the apparatus of FIG. 5A.

FIG. 5G is a detailed view of the embodiment of the second resilient coupling of FIG. 5F.

FIG. 5H is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 5A.

FIG. 5J is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 5A.

FIG. 5K is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5L is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5M is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5N is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5P is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5Q is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5R is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5S is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 5A.

FIG. 5T is a top view of an alternate embodiment of the first resilient coupling of the apparatus of FIG. 5A.

FIG. 5U is a detailed view of the alternate embodiment of the first resilient coupling of FIG. 5T.

FIG. 5V is a top view of an alternate embodiment of the second resilient coupling of the apparatus of FIG. 5A.

FIG. 5W is a detailed view of the alternate embodiment of the second resilient coupling of FIG. 5V.

FIG. 5X is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 5Y is a top view of an embodiment of the sliding supports of the apparatus of FIG. 5X.

FIG. 5Z is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 5X.

FIG. 5AA is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 5X.

FIG. 5BB is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 5X.

FIG. 6A is a cross-sectional view illustrating an embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 6B is a top view of an embodiment of the apparatus of FIG. 6A.

FIG. 6C is a bottom view of an embodiment of the mass of the apparatus of FIG. 6A.

FIG. 6D is a top view of an embodiment of the first resilient coupling of the apparatus of FIG. 6A.

FIG. 6E is a detailed view of the embodiment of the first resilient coupling of FIG. 6D.

FIG. 6F is a top view of an embodiment of the second resilient coupling of the apparatus of FIG. 6A.

FIG. 6G is a detailed view of the embodiment of the second resilient coupling of FIG. 6F.

FIG. 6H is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 6A.

FIG. 6J is a bottom view of an alternate embodiment of the mass of the apparatus of FIG. 6A.

FIG. 6K is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6L is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6M is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6N is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6P is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6Q is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6R is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6S is a top view of an alternate embodiment of the bond pad of the apparatus of FIG. 6A.

FIG. 6T is a top view of an alternate embodiment of the first resilient coupling of the apparatus of FIG. 6A.

FIG. 6U is a detailed view of the alternate embodiment of the first resilient coupling of FIG. 6T.

FIG. 6V is a top view of an alternate embodiment of the second resilient coupling of the apparatus of FIG. 6A.

FIG. 6W is a detailed view of the alternate embodiment of the second resilient coupling of FIG. 6V.

FIG. 6X is a cross-sectional view illustrating an alternate embodiment of an apparatus for resiliently attaching a mass to a package.

FIG. 6Y is a top view of an embodiment of the sliding supports of the apparatus of FIG. 6X.

FIG. 6Z is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 6X.

FIG. 6AA is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 6X.

FIG. 6BB is a top view of an alternate embodiment of the sliding supports of the apparatus of FIG. 6X.

FIG. 7A is a top view of an alternate embodiment of the apparatus of FIG. 1A.

FIG. 7B is a cross-sectional view of an alternate embodiment of the apparatus of FIG. 1A.

FIG. 7C is a top view of an alternate embodiment of the apparatus of FIG. 1A.

FIG. 7D is a cross-sectional view of an alternate embodiment of the apparatus of FIG. 1A.

DETAILED DESCRIPTION OF THE ILLUSTRATIVE EMBODIMENTS

Referring initially to FIGS. 1A through 1E, an embodiment of a system 100 for resiliently coupling a mass to a package preferably includes a package 102, a mass 104, one or more bond pads 106, one or more resilient couplings 108, and one or more electrical connections 112.

The package 102 is preferably coupled to the resilient couplings 108 and the electrical connections 112. The package 102 may be, for example, a housing or a substrate. In a preferred embodiment, the package 102 is a housing in order to optimally provide a surface mount component. The package 102 preferably includes a top parallel planar surface 114 and a cavity 116. The cavity 116 preferably includes a first wall 118, a second wall 120, a third wall 122 and a fourth wall 124. The first wall 118 and the third wall 122 are preferably approximately parallel to each other and the second wall 120 and the fourth wall 124 are preferably approximately parallel to each other. The second wall 120 and the fourth 124 wall are also preferably perpendicular to the first wall 118 and the third wall 122. The cavity 116 preferably includes a bottom surface 126. The package 102 may be any number of conventional commercially available housings of the type ceramic, metal or plastic. In a preferred embodiment, the package 102 is ceramic in order to optimally provide vacuum sealing of the mass 104 within the package 102.

The mass 104 is preferably resiliently attached to the package 102 by the resilient couplings 108 and electrically coupled to the package 102 by the electrical connections 112. The mass 104 preferably has an approximately rectangular cross-sectional shape. In a preferred embodiment, the mass 104 is a micro machined sensor substantially as disclosed in copending U.S. patent application Ser. No. 09/936,640, filed on Sep. 12, 2001, the disclosure of which is incorporated herein by reference.

In a preferred embodiment, the mass 104 includes a top parallel planar surface 128 and a bottom parallel planar surface 130. The bottom parallel planar surface 130 of the mass 104 preferably includes a first side 132, a second side 134, a third side 136, and a fourth side 138. The first side 132 and the third side 136 are preferably approximately parallel to each other and the second side 134 and the fourth side 138 are preferably approximately parallel to each other and preferably approximately perpendicular to the first side 132 and the third side 136. The mass 104 preferably includes a passive region 140 at one end and an active region 146 at the opposite end.

In a preferred embodiment, the bottom parallel planar surface 130 of the mass 104 includes the bond pads 106. In a preferred embodiment, the bond pads 106 are located in the passive region 140 of the bottom parallel planar surface 130 of the mass 104. The bond pads 106 may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 132 of the bottom parallel planar surface 130 of the mass 104 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 134 of the bottom parallel planar surface 130 of the mass 104. In a preferred embodiment, the bond pads 106 are located a perpendicular distance ranging from about 7 to 12 mils from the first side 132 of the bottom parallel planar surface 130 of the mass 104 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 134 of the bottom parallel planar surface 130 of the mass 104 in order to optimally minimize thermal stresses. The bond pads 106 may be used for, for example, solder, conductive epoxy, non-conductive epoxy, or glass frit bonding. In a preferred embodiment, the bond pads 106 are used for solder bonding in order to optimally provide good manufacturability. In a preferred embodiment, the bond pads 106 contact area is maximized in order to optimize the shock tolerance of the mass 104. In a preferred embodiment, the bond pads 106 have minimal discontinuities in order to optimize the distribution of thermal stresses in the mass 104. In several alternate embodiments, there is a plurality of bond pads 106 in order to optimize the relief of thermal stresses in the mass 104. In a preferred embodiment, there is a single bond pad 106 a. The bond pad 106 a preferably has an approximately rectangular cross-sectional shape. The length L_(106a) of the bond pad 106 a may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L_(106a) of the bond pad 106 a ranges from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W_(106a) of the bond pad 106 a may range, for example, from about 15 to 25 mils. In a preferred embodiment, the width W_(106a) of the bond pad 106 a ranges from about 18 to 22 mils in order to optimally minimize thermal stresses. The height H_(106a) of the bond pad 106 a may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H_(106a) of the bond pad 106 a ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The resilient couplings 108 preferably resiliently attach the bond pads 106 to the package 102. The resilient couplings 108 are preferably coupled to the bottom surface 126 of the cavity 116 of the package 102. In a preferred embodiment, the resilient couplings 108 are solder preforms. In a preferred embodiment, the resilient couplings 108 have an approximately rectangular cross-sectional shape. In a preferred embodiment, the resilient couplings 108 have minimal discontinuities in order to optimize the distribution of thermal stresses. In several alternate embodiments, there is a plurality of resilient couplings 108 in order to optimize the relief of thermal stresses in the mass 104. The resilient couplings 108 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 108 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The resilient couplings 108 may be located a perpendicular distance ranging, for example, from about 6 to 25 mils from the first wall 118 of the cavity 116 of the package 102 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 120 of the cavity 116 of the package 102. In a preferred embodiment, the resilient couplings 108 are located a perpendicular distance ranging from about 7 to 12 mils from the first wall 118 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 120 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses. In a preferred embodiment, there is a single resilient coupling 108. The length L₁₀₈ of the resilient coupling 108 may range, for example, from about 200 to 250 mails. In a preferred embodiment, the length L₁₀₈ of the resilient coupling 108 ranges from about 225 to 235 mils in order to optimally minimize thermal stresses. The width W₁₀₈ of the resilient coupling 108 may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W₁₀₈ of the resilient coupling 108 ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₁₀₈ of the resilient coupling 108 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₁₀₈ of the resilient coupling 108 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient couplings 108 further include one or more first bumpers 142 and one or more second bumpers 144 for slidingly supporting the mass 104. In a preferred embodiment, the first bumpers 142 are located on one side of the bond pads 106 and the second bumpers 144 are located on another side of the bond pads 106. In a preferred embodiment, the first bumpers 142 and the second bumpers 144 are proximate to the bond pads 106. The width W₁₄₂ of the first bumpers 142 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₁₄₂ of the first bumpers 142 ranges from about 3 to 5 mils in order to minimize thermal stresses. The width W₁₄₄ of the second bumpers 144 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₁₄₄ of the second bumpers 144 ranges from about 3 to 5 mils in order to minimize thermal stresses. In a preferred embodiment, the resilient couplings 108 are coupled to the bond pads 106 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 108 are coupled to the bottom surface 126 of the cavity 116 of the package 102 using conventional solder equipment and processes. In a preferred embodiment, there is a single first bumper 142 and a single second bumper 144.

The electrical connections 112 preferably electrically couple the mass 104 to the package 102. In a preferred embodiment, there is a single electrical connection 112. The electrical connection 112 preferably electrically couples the top parallel planar surface 114 of the package 102 to the top parallel planar surface 128 of the mass 104. In a preferred embodiment, the electrical connection 112 is a wire bond. The electrical connection 112 may be any number of conventional commercially available wire bonds of the type, for example, aluminum or gold. In a preferred embodiment, the electrical connection 112 is gold in order to optimally provide compatibility with the package 102 and the mass 104 metallization. In a preferred embodiment, the electrical connection 112 is coupled to the package 102 using conventional wire-bonding equipment and processes. In a preferred embodiment, the electrical connection 112 is coupled to the mass 104 using conventional wire-bonding equipment and processes.

Referring to FIG. 1F, in an alternate embodiment, there is a first bond pad 148 a and a second bond pad 148 b that are substantially equal in size and horizontally proximate to each other. The bond pads 148 a and 148 b may be used for, for example, solder, conductive epoxy, non-conductive epoxy, or glass frit bonding. In a preferred embodiment, the bond pads 148 a and 148 b are used for solder bonding in order to optimally provide good manufacturability. The bond pads 148 a and 148 b preferably have an approximately rectangular cross-sectional shape. The length L₁₄₈ of the bond pads 148 a and 148 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L₁₄₈ of the bond pads 148 a and 148 b range from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W₁₄₈ of the bond pads 148 a and 148 b may range, for example, from about 10 to 20 mils. In a preferred embodiment, the width W₁₄₈, of the bond pads 148 a and 148 b range from about 13 to 18 mils in order to optimally minimize thermal stresses. The height H₁₄₈ of the bond pads 148 a and 148 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₄₈ of the bond pads 148 a and 148 b range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The first bond pad 148 a is preferably located in the passive region 140 of the bottom parallel planar surface 130 of the mass 104. The first bond pad 148 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 132 of the bottom parallel planar surface 130 of the mass 104 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 134 of the bottom parallel planar surface 130 of the mass 104. The first bond pad 148 a is preferably located a perpendicular distance ranging from about 7 to 12 mils from the first side 132 of the bottom parallel planar surface 130 of the mass 104 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 134 of the bottom parallel planar surface 130 of the mass 104 in order to optimally minimize thermal stresses.

The second bond pad 148 b is preferably located in the passive region 140 of the bottom parallel planar surface 130 of the mass 104. The second bond pad 148 b may be located a perpendicular distance ranging, for example, from about 15 to 45 mils from the first side 132 of the bottom parallel planar surface 130 of the mass 104 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 134 of the bottom parallel planar surface 130 of the mass 104. The second bond pad 148 b is preferably located a perpendicular distance ranging from about 20 to 30 mils from the first side 132 of the bottom parallel planar surface 130 of the mass 104 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 134 of the bottom parallel planar surface 130 of the mass 104 in order to optimally minimize thermal stresses.

Referring to FIG. 1G, in an alternate embodiment, there is a single bond pad 106 b. The bond pad 106 b may have an approximately oval cross-sectional shape. The bond pad 106 b may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 106 b has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₁₀₆ of the bond pad 106 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pad 106 b range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 1H, in an alternate embodiment, there is a bond pad 106 c and a bond pad 106 d. The bond pads 106 c and 106 d are substantially equal in size, vertically proximate to each other, and have an approximately oval cross-sectional shape. The bond pads 106 c and 106 d may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 106 c and 106 d have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₁₀₆ of the bond pads 106 c and 106 d may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pads 106 c and 106 d range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 1J, in an alternate embodiment, there is a single bond pad 106 e. The bond pad 106 e has an approximately tri-oval cross-sectional shape. The bond pad 106 e may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 106 e has an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally provide minimize thermal stresses. The height H₁₀₆ of the bond pad 106 e may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pad 106 e ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 1K, in an alternate embodiment, there is a single bond pad 106 f. The bond pad 106 f may have an approximately oct-oval cross-sectional shape. The bond pad 106 f may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 106 f has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₁₀₆ of the bond pad 106 f may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pad 106 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 1L, in an alternate embodiment, there is a bond pad 106 g and a bond pad 106 h. The bond pads 106 g and 106 h are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 106 g and 106 h may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 106 g and 106 h have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₁₀₆ of the bond pads 106 g and 106 h may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pads 106 g and 106 h range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 1M, in an alternate embodiment, there is a bond pad 106 i, a bond pad 106 j, and a bond pad 106 k. The bond pads 106 i, 106 j, and 106 k are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 106 i, 106 j, and 106 k may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 106 i, 106 j, and 106 k have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₁₀₆ of the bond pads 106 i, 106 j, and 106 k may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pads 106 i, 106 j, and 106 k range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 1N in an alternate embodiment, there is a single bond pad 106 l. The bond pad 106 l may have an approximately wavy sided rectangular cross-sectional shape. The bond pad 106 l may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 106 l has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₁₀₆ of the bond pad 106 l may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pad 106 l ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 1P, in an alternate embodiment, there is a bond pad 106 m and a bond pad 106 n. The bond pads 106 m and 106 n are horizontally proximate to each other and have an approximately rectangular cross-sectional shape. The bond pad 106 m is approximately smaller in size than the bond pad 106 n. The bond pads 106 m and 106 n may have an approximate total cross-sectional area ranging from about 4000 to 8750 square units. In a preferred embodiment, the bond pads 106 m and 106 n have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₁₀₆ of the bond pads 106 m and 106 n may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₁₀₆ of the bond pads 106 m and 106 n range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIGS. 1Q and 1R, in an alternate embodiment, there is a first resilient coupling 150 a and a second resilient coupling 150 b. In a preferred embodiment, the resilient couplings 150 a and 150 b are solder preforms preferably having an approximately rectangular cross-sectional shape. The resilient couplings 150 a and 150 b are vertically proximate to each other and substantially equal in size. The resilient couplings 150 a and 150 b may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 150 a and 150 b are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The length L₁₅₀ of the resilient couplings 150 a and 150 b may range, for example, from about 90 to 120 mils. In a preferred embodiment, the length L₁₅₀ of the resilient couplings 150 a and 150 b ranges from about 101 to 112 mils in order to optimally minimize thermal stresses. The width W₁₅₀ of the resilient couplings 150 a and 150 b may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W₁₅₀ of the resilient couplings 150 a and 150 b ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₁₅₀ of the resilient couplings 150 a and 150 b may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₁₅₀ of the resilient couplings 150 a and 150 b ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 150 a and 150 b are coupled to the bottom surface 126 of the cavity 116 of the package 102 using conventional solder equipment and processes.

The first resilient coupling 150 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 118 of the cavity 116 of the package 102 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 120 of the cavity 116 of the package 102. In a preferred embodiment, the first resilient coupling 150 a is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 118 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 120 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses.

The second resilient coupling 150 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 118 of the cavity 116 of the package 102 and may be located a perpendicular distance ranging, for example, from about 105 to 145 mils from the second wall 120 of the cavity 116 of the package 102. In a preferred embodiment, the second resilient coupling 150 b is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 118 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses and located a distance ranging from about 112 to 127 mils from the second wall 120 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient couplings 150 a and 150 b further include one or more first bumpers 152 for slidingly supporting the mass 104. In a preferred embodiment, the first bumpers 152 are located on one side of the bond pads 106. In a preferred embodiment, the first bumpers 152 are proximate to the bond pads 106. The width W₁₅₂ of the first bumpers 152 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₁₅₂ of the first bumpers 152 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient couplings 150 a and 150 b further include one or more second bumpers 154 for slidingly supporting the mass 104. In a preferred embodiment, the second bumpers 154 are located on another side of the bond pads 106 opposite the bumpers 152. In a preferred embodiment, the second bumpers 154 are proximate to the bond pads 106. The width W₁₅₄ of the second bumpers 154 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₁₅₂ of the second bumpers 154 range from about 3 to 5 mils in order to optimally minimize thermal stresses.

Referring to FIGS. 1S through 1W, in an alternate embodiment, the system 100 further includes one or more sliding supports 110 e, 110 f, 110 g or 10 h preferably slidingly supporting the mass 104. The number of sliding supports 110 e, 110 f, 110 g or 110 h preferably depends upon having a sufficient amount of sliding supports 110 e, 110 f, 110 g or 110 h in order to optimally slidingly support the mass 104. The sliding supports 110 e, 110 f, 110 g or 110 h are preferably coupled to the bottom surface 126 of the cavity 116 of the package 102.

The sliding supports 110 e may have an approximately square cross-sectional shape. The sliding supports 110 f may have an approximately rectangular cross-sectional shape. The sliding supports 110 g may have an approximately triangular cross-sectional shape. The sliding supports 110 h may have an approximately circular cross-sectional shape. The sliding supports 110 e, 110 f, 110 g or 110 h may have an approximate cross-sectional area ranging from about 400 to 1600 square mils, individually. In a preferred embodiment, the sliding supports 110 e, 110 f, 110 g or 110 h have an approximate cross-sectional area ranging from about 625 to 1225 square mils, individually, in order to optimally minimize thermal stresses. The height H₁₁₀ of the sliding supports 110 e, 110 f, 110 g or 110 h may range, for example, from about 0.5 to 3 mils. In a preferred embodiment, the height H₁₁₀ of the sliding supports 110 e, 110 f, 110 g or 110 h ranges from about 1 to 1.5 mils in order to optimally minimize thermal stresses.

The sliding supports 110 e, 110 f, 110 g or 110 h may be, for example, tungsten or ceramic. In a preferred embodiment, the sliding supports 110 e, 110 f, 110 g or 110 h are tungsten in order to optimally provide a standard packaging procedure. In a preferred embodiment, the sliding supports 110 c, 110 f, 110 g or 110 h are coupled to the bottom surface 126 of the cavity 116 of the package 102 using conventional means of integrating the sliding supports 110 into the package 102.

In a preferred embodiment, there is a first sliding support 110 ea, a second sliding support 110 eb, a third sliding support 110 ec, and a fourth sliding support 110 ed. In a preferred embodiment, the sliding supports 110 ea, 110 eb, 110 ec, and 110 ed have an approximately square cross-sectional shape. The first sliding support 110 ea may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 118 of the cavity 116 of the package 102 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 120 of the cavity 116 of the package 102. In a preferred embodiment, the first sliding support 110 ea is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 118 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses and located a perpendicular distance from about 90 to 105 mils from the second wall 120 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses.

The second sliding support 110 eb may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 118 of the cavity 116 of the package 102 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 120 of the cavity 116 of the package 102. In a preferred embodiment, the second sliding support 110 eb is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 118 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 120 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses.

The third sliding support 110 ec may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 118 of the cavity 116 of the package 102 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 120 of the cavity 116 of the package 102. In a preferred embodiment, the third sliding support 110 ec is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 118 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 120 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses.

The fourth sliding support 110 ed may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 118 of the cavity 116 of the package 102 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 120 of the cavity 116 of the package 102. In a preferred embodiment, the fourth sliding support 110 ed is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 118 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 90 to 105 mils from the second wall 120 of the cavity 116 of the package 102 in order to optimally minimize thermal stresses.

In an alternate embodiment, the resilient couplings 108 may also electrically couple the mass 104 to the package 102.

In an alternate embodiment, the resilient couplings 150 a and 150 b may also electrically couple the mass 104 to the package 102.

Referring to FIGS. 2A through 2E, an embodiment of a system 200 for resiliently coupling a mass to a package preferably includes a package 202, a mass 204, one or more bond pads 206, one or more resilient couplings 208, and one or more electrical connections 212.

The package 202 is preferably coupled to the resilient couplings 208 and the electrical connections 212. The package 202 may be, for example, a housing or a substrate. In a preferred embodiment, the package 202 is a housing in order to optimally provide a surface mount component. The package 202 preferably includes a first parallel planar surface 214, a second parallel planar surface 216 and a cavity 218. The cavity 218 preferably includes a first wall 220, a second wall 222, a third wall 224 and a fourth wall 226. The first wall 220 and the third wall 224 are preferably approximately parallel to each other and the second wall 222 and the fourth wall 226 are preferably approximately parallel to each other. The second wall 222 and the fourth wall 226 are also preferably perpendicular to the first wall 220 and the third wall 224. The cavity 218 preferably includes a bottom surface 228. The package 202 may be any number of conventional commercially available housings of the type, for example, ceramic, metal or plastic. In a preferred embodiment, the package 202 is ceramic in order to optimally provide vacuum sealing of the mass 204 in the package 202.

The mass 204 is preferably resiliently attached to the package 202 by the resilient couplings 268 and electrically coupled to the package 202 by the electrical connections 212. The mass 204 preferably has an approximately rectangular cross-sectional shape. The mass 204 preferably has a passive region 250 on one end and an active region 256 at the opposite end. In a preferred embodiment, the mass 204 includes a first member 230, a second member 232, and a third member 234. The first member 230 is preferably on top of the second member 232 and the second member 232 is preferably on top of the third member 234. In a preferred embodiment, the first member 230, the second member 232, and the third member 234 are a micro machined sensor substantially as disclosed in copending U.S. patent application Ser. No. 09/936,640, filed on Sep 12, 2001, the disclosure of which is incorporated herein by reference. The first member 230 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the first member includes a top parallel planar surface 236. The second member 232 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the second member 232 includes a middle parallel planar surface 238. The third member 234 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the third member 234 includes a bottom parallel planar surface 240. The bottom parallel planar surface 240 of the mass 204 preferably includes a first side 242, a second side 244, a third side 246, and a fourth side 248. The first side 242 and the third side 246 are preferably approximately parallel to each other and the second side 244 and the fourth side 248 are preferably approximately parallel to each other and preferably approximately perpendicular to the first side 242 and the third side 246.

In a preferred embodiment, the bottom parallel planar surface 240 of the mass 204 includes the bond pads 206. In a preferred embodiment, the bond pads 206 are located in the passive region 250 of the bottom parallel planar surface 240 of the mass 204. The bond pads 206 may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 242 of the bottom parallel planar surface 240 of the mass 204 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 244 of the bottom parallel planar surface 240 of the mass 204. In a preferred embodiment, the bond pads 206 are located a perpendicular distance ranging from about 7 to 12 mils from the first side 242 of the bottom parallel planar surface 240 of the mass 204 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 244 of the bottom parallel planar surface 240 of the mass 204 in order to optimally minimize thermal stresses. The bond pads 206 may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 206 are used for solder bonding in order to optimally provide good manufacturability. In a preferred embodiment, the bond pads 206 contact area is maximized in order to optimize the shock tolerance of the mass 204. In a preferred embodiment, the bond pads 206 have minimal discontinuities in order to optimize the distribution of thermal stresses in the mass 204. In several alternate embodiments, there is a plurality of bond pads 206 in order to optimize the relief of thermal stresses in the mass 204. In a preferred embodiment, there is a single bond pad 206 a. The bond pad 206 a preferably has an approximately rectangular cross-sectional shape. The length L_(206a) of the bond pad 206 a may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L_(206a) of the bond pad 206 a ranges from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W_(206a) of the bond pad 206 a may range, for example, from about 15 to 25 mils. In a preferred embodiment, the width W_(206a) of the bond pad 206 a ranges from about 18 to 22 mils in order to optimally minimize thermal stresses. The height H_(206a) of the bond pad 206 a may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H_(206a) of the bond pad 206 a ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The resilient couplings 208 preferably resiliently attach the bond pads 206 to the package 202. The resilient couplings 208 are preferably coupled to the bottom surface 228 of the cavity 218 of the package 202. In a preferred embodiment, the resilient couplings 208 are solder preforms. In a preferred embodiment, the resilient couplings 208 have an approximate cross-sectional rectangular shape. In a preferred embodiment, the resilient couplings 208 have minimal discontinuities in order to optimize the distribution of thermal stresses. In several alternate embodiments, there is a plurality of resilient couplings 208 in order to optimize the relief of thermal stresses in the mass 204. The resilient couplings 208 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 208 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The resilient couplings 208 may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 220 of the cavity 218 of the package 202 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 222 of the cavity 218 of the package 202. In a preferred embodiment, the resilient couplings 208 are located a perpendicular distance ranging from about 7 to 12 mils from the first wall 220 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 222 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses. In a preferred embodiment, there is a single resilient coupling 208. The length L₂₀₈ of the resilient coupling 208 may range, for example, from about 200 to 250 mils. In a preferred embodiment, the length L₂₀₈ of the resilient coupling 208 ranges from about 225 to 235 mils in order to optimally minimize thermal stresses. The width W₂₀₈ of the resilient coupling 208 may range, for example, from about 20 to mils. In a preferred embodiment, the width W₂₀₈ of the resilient coupling 208 ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₂₀₈ of the resilient coupling 208 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₂₀₈ of the resilient coupling 208 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient couplings 208 further include one or more first bumpers 252 and one or more second bumpers 254 for slidingly supporting the mass 204. In a preferred embodiment, the first bumpers 252 are located on one side of the bond pads 206 and the second bumpers 254 are located on another side of the bond pads 206. In a preferred embodiment, the first bumpers 252 and the second bumpers 254 are proximate to the bond pads 206. The width W₂₅₂ of the first bumpers 252 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₂₅₂ of the first bumpers 252 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. The width W₂₅₄ of the second bumpers 254 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₂₅₄ of the second bumpers 254 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 208 are coupled to the bond pads 206 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 208 are coupled to the bottom surface 228 of the cavity 218 of the package 202 using conventional solder equipment and processes. In a preferred embodiment, there is a single first bumper 252 and a single second bumper 254.

The electrical connections 212 preferably electrically couple the mass 204 to the package 202. In a preferred embodiment, the electrical connections 212 are wire bonds. The electrical connections 212 may be any number of conventional commercially available wire bonds of the type, for example, gold or aluminum. In a preferred embodiment, the electrical connections 212 are gold in order to optimally provide compatibility with the package 202 and the mass 204 metallization. In a preferred embodiment, there is a first electrical connection 212 a and a second electrical connection 212 b. The first electrical connection 212 a preferably electrically couples the first parallel planar surface 214 of the package 202 to the top parallel planar surface 236 of the mass 204. The second electrical connection 212 b preferably electrically couples the second parallel planar surface 216 of the package 202 to the middle parallel planar surface 238 of the mass 204. In a preferred embodiment, the electrical connections 212 are coupled to the package 202 using conventional wire-bonding equipment and processes. In a preferred embodiment, the electrical connections 212 are coupled to the mass 204 using conventional wire-bonding equipment and processes.

Referring to FIG. 2F, in an alternate embodiment, there is a bond pad 258 a and a bond pad 258 b that are substantially equal in size and horizontally proximate to each other. The bond pads 258 a and 258 b may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 258 a and 258 b are used for solder bonding in order to optimally provide good manufacturability. The bond pads 258 a and 258 b preferably have an approximately rectangular cross-sectional shape. The length L₂₅₈ of the bond pads 258 a and 258 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L₂₅₈ of the bond pads 258 a and 258 b range from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W₂₅₈ of the bond pads 258 a and 258 b may range, for example, from about 10 to 20 mils. In a preferred embodiment, the width W₂₅₈ of the bond pads 258 a and 258 b range from about 13 to 18 mils in order to optimally minimize thermal stresses. The height H₂₅₈ of the bond pads 258 a and 258 b may range, for example, from about 0.1 to 1 mils. In a preferred embodiment, the height H₂₅₈ of the bond pads 258 a and 258 b range from about 0.24 to 0.72 mils in order to optimally minimize thermal stresses.

The first bond pad 258 a is preferably located in the passive region 250 of the bottom parallel planar surface 240 of the mass 204. The first bond pad 258 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 242 of the bottom parallel planar surface 240 of the mass 204 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 244 of the bottom parallel planar surface 240 of the mass 204. The first bond pad 258 a is preferably located a perpendicular distance ranging from about 7 to 12 mils from the first side 242 of the bottom parallel planar surface 240 of the mass 204 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 244 of the bottom parallel planar surface 240 of the mass 204 in order to optimally minimize thermal stresses.

The second bond pad 258 b is preferably located in the passive region 250 of the bottom parallel planar surface 240 of the mass 204. The second bond pad 258 b may be located a perpendicular distance ranging, for example, from about 15 to 45 mils from the first side 242 of the bottom parallel planar surface 240 of the mass 204 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 244 of the bottom parallel planar surface 240 of the mass 204. The second bond pad 258 b is preferably located a perpendicular distance ranging from about 20 to 30 mils from the first side 242 of the bottom parallel planar surface 240 of the mass 204 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 244 of the bottom parallel planar surface 240 of the mass 204 in order to optimally minimize thermal stresses.

Referring to FIG. 2G, in an alternate embodiment, there is a single bond pad 206 b. The bond pad 206 b may have an approximately oval cross-sectional shape. The bond pad 206 b may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 206 b has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₂₀₆ of the bond pad 206 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₂₀₆, of the bond pad 206 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 2H, in an alternate embodiment, there is a first bond pad 206 c and a second bond pad 206 d. The bond pads 206 c and 206 d are substantially equal in size, vertically proximate to each other, and have an approximately oval cross-sectional shape. The bond pads 206 c and 206 d may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 206 c and 206 d have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₂₀₆, of the bond pads 206 c and 206 d may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₂₀₆ of the bond pads 206 c and 206 d range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 2J, in an alternate embodiment, there is a single bond pad 206 e. The bond pad 206 e has an approximately tri-oval cross-sectional shape. The bond pad 206 e may have approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 206 e has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₂₀₆ of the bond pad 206 e may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₂₀₆ of the bond pad 206 e ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 2K, in an alternate embodiment, there is a single bond pad 206 f. The bond pad 206 f has an approximately oct-oval cross-sectional shape. The bond pad 206 f may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 206 f has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₂₀₆ of the bond pad 206 f may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₂₀₆ of the bond pad 206 f ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 2L, in an alternate embodiment, there is a bond pad 206 g and a bond pad 206 h. The bond pads 206 g and 206 h are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 206 g and 206 h may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 206 g and 206 h have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally provide minimize thermal stresses. The height H₂₀₆ of the bond pads 206 g and 206 h may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₂₁₁ of the bond pads 206 g and 206 h ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 2M, in an alternate embodiment, there is a bond pad 206 i, a bond pad 206 j, and a bond pad 206 k. The bond pads 206 i, 206 j, and 206 k are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 206 i, 206 j, and 206 k may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 206 i, 206 j, and 206 k have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₂₀₆ of the bond pads 206 i, 206 j, and 206 k may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₂₀₆ of the bond pads 206 i, 206 j, and 206 k range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 2N in an alternate embodiment, there is a single bond pad 206 l. The bond pad 206 l may have an approximately wavy sided rectangular cross-sectional shape. The bond pad 206 l may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 206 l has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₂₀₆ of the bond pad 206 l may range, for example, from about 0.1 to 1 microns. In a preferred embodiment, the height H₂₀₆ of the bond pad 206 l ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 2P, in an alternate embodiment, there is a bond pad 206 m and a bond pad 206 n. The bond pads 206 m and 206 n are horizontally proximate to each other and have an approximately rectangular cross-sectional shape. The bond pad 206 m is approximately smaller in size than the bond pad 206 n. The bond pads 206 m and 206 n may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 206 m and 206 n have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₂₀₆ of the bond pads 206 m and 206 n may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₂₀₆ of the bond pads 206 m and 206 n range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIGS. 2Q and 2R, in an alternate embodiment, there is a first resilient coupling 260 a and a second resilient coupling 260 b. In a preferred embodiment, the resilient couplings 260 a and 260 b are solder preforms preferably having an approximately rectangular cross-sectional shape. The resilient couplings 260 a and 260 b are vertically proximate to each other and substantially equal in size. The resilient couplings 260 a and 260 b may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 260 a and 260 b are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The length L₂₆₀ of the resilient couplings 260 a and 260 b may range, for example, from about 90 to 120 mils. In a preferred embodiment, the length L₂₆₀ of the resilient couplings 260 a and 260 b ranges from about 101 to 112 mils in order to optimally minimize thermal stresses. The width W₂₆₀ of the resilient couplings 260 a and 260 b may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W₂₆₀ of the resilient couplings 260 a and 260 b ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₂₀₆ of the resilient couplings 260 a and 260 b may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₂₆₀ of the resilient couplings 260 a and 260 b ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 260 a and 260 b are coupled to the bottom surface 228 of the cavity 218 of the package 202 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 260 a and 260 b are coupled to the bond pads 206 using conventional solder equipment and processes.

The first resilient coupling 260 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 220 of the cavity 218 of the package 202 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 222 of the cavity 218 of the package 202. In a preferred embodiment, the first resilient coupling 260 a is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 220 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 222 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses.

The second resilient coupling 260 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 220 of the cavity 218 of the package 202 and may be located a perpendicular distance ranging, for example, from about 105 to 145 mils from the second wall 222 of the cavity 218 of the package 202. In a preferred embodiment, the second resilient coupling 260 b is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 228 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses and located a distance ranging from about 112 to 127 mils from the second wall 222 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient couplings 260 a and 260 b further include one or more first bumpers 262 for slidingly supporting the mass 204. In a preferred embodiment, the first bumpers 262 are located on one side of the bond pads 206. In a preferred embodiment, the first bumpers 262 are proximate to the bond pads 206. The width W₂₆₂ of the first bumpers 262 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₂₆₂ of the first bumpers 262 range from about 3 to 5 mils in order to optimally minimize thermal stresses. In a preferred embodiment, there is a single first bumper 262.

In a preferred embodiment, the resilient couplings 260 a and 260 b further include one or more second bumpers 264 for slidingly supporting the mass 204. In a preferred embodiment, the second bumpers 264 are located on another side of the bond pads 206 opposite the first bumpers 262. In a preferred embodiment, the second bumpers 264 are proximate to the bond pads 206. The width W₂₆₄ of the second bumpers 264 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₂₆₄ of the second bumpers 264 range from about 3 to 5 mils in order to optimally minimize thermal stresses. In a preferred embodiment, there is a single second bumper 264.

Referring to FIGS. 2S through 2W, in an alternate embodiment, the system 200 further includes one or more sliding supports 210 e, 210 f, 210 g, or 210 h. The sliding supports 210 e, 210 f, 210 g, or 210 h preferably slidingly support the mass 204. The number of sliding supports 210 e, 210 f, 210 g, or 210 h preferably depends upon having a sufficient amount of sliding supports in order to optimally slidingly support the mass 204. The sliding supports 210 e, 210 f, 210 g, or 210 h are preferably coupled to the bottom surface 228 of the cavity 218 of the package 202. The sliding supports 210 e may have an approximately square cross sectional shape. The sliding supports 210 f may have an approximately rectangular cross-sectional shape. The sliding supports 210 g may have an approximately triangular croo-sectional shape. The sliding supports 210 h may have an approximately circular shape. The sliding supports 210 e, 210 f, 210 g, or 210 h may, for example, be tungsten or ceramic. In a preferred embodiment, the sliding supports 210 e, 210 f, 210 g, or 210 h are tungsten in order to optimally provide a standard packaging process. In a preferred embodiment, the sliding supports 210 e, 210 f, 210 g, or 210 h are coupled to the bottom surface 228 of the cavity 218 of the package 202 using conventional means of integrating the sliding supports 210 e, 210 f, 210 g, or 210 h into the package 202.

The sliding supports 210 e, 210 f, 210 g, or 210 h may have an approximate cross-sectional area ranging from about 400 to 1600 square mils, individually. In a preferred embodiment, the sliding supports 210 e, 210 f, 210 g, or 210 h have an approximate cross-sectional area ranging from about 625 to 1225 square mils, individually, in order to optimally minimize thermal stresses. The height H₂₁₀ of the sliding supports 210 e, 210 f, 210 g, or 210 h may range, for example, from about 0.5 to 3 mils. In a preferred embodiment, the height H₂₁₀ of the sliding supports 210 e, 210 f, 210 g, or 210 h ranges from about 1 to 1.5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, there is a first sliding support 210 ea, a second sliding support 210 eb, a third sliding support 210 ec, and a fourth sliding support 210 ed. The first sliding support 210 ea may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 220 of the cavity 218 of the package 202 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 222 of the cavity 218 of the package 202. In a preferred embodiment, the first sliding support 210 ea is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 220 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses and located a perpendicular distance from about 90 to 105 mils from the second wall 222 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses.

The second sliding support 210 eb may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 220 of the cavity 218 of the package 202 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 222 of the cavity 218 of the package 202. In a preferred embodiment, the second sliding support 210 eb is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 220 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 222 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses.

The third sliding support 210 ec may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 220 of the cavity 218 of the package 202 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 222 of the cavity 218 of the package 202. In a preferred embodiment, the third sliding support 210 ec is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 220 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 222 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses.

The fourth sliding support 210 ed may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 220 of the cavity 218 of the package 202 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 222 of the cavity 218 of the package 202. In a preferred embodiment, the fourth sliding support 210 ed is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 220 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 90 to 105 mils from the second wall 222 of the cavity 218 of the package 202 in order to optimally minimize thermal stresses.

In an alternate embodiment, the resilient couplings 208 may also electrically couple the mass 204 to the package 202.

In an alternate embodiment, the resilient couplings 260 a and 260 b may also electrically couple the mass 204 to the package 202.

Referring to FIGS. 3A through 3E, an embodiment of a system 300 for resiliently coupling a mass to a package preferably includes a package 302, a mass 304, one or more bond pads 306, one or more resilient couplings 308, and one or more electrical connections 310.

The package 302 is coupled to the resilient couplings 308 and the electrical connections 310. The package 302 may be, for example, a housing or a substrate. In a preferred embodiment, the package 302 is a housing in order to optimally provide a surface mount component. The package 302 preferably includes a top parallel planar surface 312 and a cavity 314. The cavity 314 preferably includes a first wall 316, a second wall 318, a third wall 320 and a fourth wall 322. The first wall 316 and the third wall 320 are preferably approximately parallel to each other and the second wall 318 and the fourth wall 322 are preferably approximately parallel to each other. The second wall 318 and the fourth 322 wall are also preferably perpendicular to the first wall 316 and the third wall 320. The cavity 314 preferably includes a bottom surface 324. The package 302 may be any number of conventional commercially available housings of the type, for example, ceramic, metal or plastic. In a preferred embodiment, the package 302 is ceramic in order to optimally provide vacuum sealing of the mass 304 within the package 302.

The mass 304 is preferably resiliently attached to the package 302 by the resilient couplings 308 and electrically coupled to the package 302 by the electrical connections 310. The mass 304 preferably has an approximately rectangular cross-sectional shape. The mass 304 preferably includes all active regions. In a preferred embodiment, the mass 304 is a micro machined sensor substantially as disclosed in copending U.S. patent application Ser. No. 09/936,640, filed on Sep. 12, 2001, the disclosure of which is incorporated herein by reference.

In a preferred embodiment, the mass 304 includes a top parallel planar surface 338 and a bottom parallel planar surface 340. The bottom parallel planar surface 340 of the mass 304 preferably includes a first side 342, a second side 344, a third side 346, and a fourth side 348. The first side 342 and the third side 346 are preferably approximately parallel to each other and the second side 344 and the fourth side 348 are preferably approximately parallel to each other and preferably approximately perpendicular to the first side 342 and the third side 346.

In a preferred embodiment, the bottom parallel planar surface 340 of the mass 304 includes the bond pads 306. In a preferred embodiment, the bond pads 306 are located substantially in the center of the bottom parallel planar surface 340 of the mass 304. The bond pads 306 may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first side 342 of the bottom parallel planar surface 340 of the mass 304 and may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the second side 344 of the bottom parallel planar surface 340 of the mass 304. In a preferred embodiment, the bond pads 306 are located a perpendicular distance ranging from about 85 to 95 mils from the first side 342 of the bottom parallel planar surface 340 of the mass 304 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 85 to 95 mils from the second side 344 of the bottom parallel planar surface 340 of the mass 304 in order to optimally minimize thermal stresses. The bond pads 306 may be, for example, used for solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 306 are used for solder bonding in order to optimally provide good manufacturability. In a preferred embodiment, the bond pads 306 contact area is maximized in order to optimize the shock tolerance of the mass 304. In a preferred embodiment, the bond pads 306 have minimal discontinuities in order to optimize the distribution of thermal stresses in the mass 304. In several alternate embodiments, there is a plurality of bond pads 306 in order to optimize the relief of thermal stresses in the mass 304. In a preferred embodiment, there is a single bond pad 306 a. The bond pad 306 a preferably has an approximately circular cross-sectional shape. The diameter D_(306a) of the bond pad 306 a may range, for example, from about 50 to 100 mils. In a preferred embodiment, the diameter D_(306a) of the bond pad 306 a ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height 306 of the bond pad 306 may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₃₀₆ of the bond pad 306 ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The resilient couplings 308 preferably resiliently attach the bond pads 306 to the package 302. The resilient couplings 308 are preferably coupled to the bottom surface 324 of the cavity 314. In a preferred embodiment, the resilient couplings 308 are solder preforms. In a preferred embodiment, the resilient couplings 308 have an approximate cross-sectional circular shape. In a preferred embodiment, the resilient couplings 308 have minimal discontinuities in order to optimize the distribution of thermal stresses. In several alternate embodiments, there is a plurality of resilient couplings 308 in order to optimize the relief of thermal stresses in the mass 304. The resilient couplings 308 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 308 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The resilient couplings 308 may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first wall 316 of the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the second wall 318 of the cavity 314 of the package 302. In a preferred embodiment, the resilient couplings 308 are located a perpendicular distance ranging from about 85 to 95 mils from the first wall 316 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a distance ranging from about 85 to 95 mils from the second wall 318 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses. In a more preferred embodiment, there is a single resilient coupling 308. The diameter D₃₀₈ of the resilient coupling 308 may range, for example, from about 50 to 100 mils. In a preferred embodiment, the diameter D₃₀₈ of the resilient coupling 308 ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₀₈, of the resilient coupling 308 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₃₀₈ of the resilient coupling 308 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient coupling 308 further includes one or more bumpers 350 for slidingly supporting the mass 304. In a preferred embodiment, there is a single bumper 350. In a preferred embodiment, the bumper 350 has an approximately annular cross-sectional shape. In a preferred embodiment, the bumper 350 surrounds the bond pads 306. In a preferred embodiment, the bumper 350 is proximate to the bond pads 306. The width W₃₅₀ of the bumper 350 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₃₅₀ of the bumper 350 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 308 are coupled to the bond pad 306 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 308 are coupled to the bottom surface 324 of the cavity 314 of the package 302 using conventional solder equipment and processes.

The electrical connections 310 preferably electrically couple the mass 304 to the package 302. In a preferred embodiment, there is a single electrical connection 310. The electrical connection 310 preferably electrically couples the top parallel planar surface 312 of the package 302 to the top parallel planar surface 338 of the mass 304. In a preferred embodiment, the electrical connection 310 is a wire bond. The electrical connection 310 may be any number of conventional commercially available wire bonds of the type, for example, gold or aluminum. In a preferred embodiment, the electrical connection 310 is gold in order to optimally provide compatibility with the package 302 and the mass 304 metallization. In a preferred embodiment, the electrical connection 310 is coupled to the package 302 using conventional wire-bonding equipment and processes. In a preferred embodiment, the electrical connection 310 is coupled to the mass 304 using conventional wire-bonding equipment and processes.

Referring to FIG. 3F, in an alternate embodiment, the bottom surface 324 of the package 302 further includes a recess 326 for receiving the resilient coupling 308. The recess 326 may be circular or square in shape. The recess 326 preferably includes a first wall 328, a second wall 330, a third wall 332 and a fourth wall 334. The first wall 328 and the third wall 332 are preferably approximately parallel to each other and the second wall 330 and the fourth wall 334 are preferably approximately parallel to each other. The second wall 330 and the fourth wall 334 are also preferably perpendicular to the first wall 328 and the third wall 332. The recess 326 preferably includes a bottom surface 336. The length L₃₂₆ of the recess 326 may range, for example, from about 110 to 130 mils. In a preferred embodiment the length L₃₂₆ of the recess 326 ranges from about 115 to 125 mils in order to optimally minimize thermal stresses. The width W₃₂₆ of the recess 326 may range, for example, from about 110 to 130 mils. In a preferred embodiment the width W₃₂₆ of the recess 326 ranges from about 115 to 125 mils in order to optimally minimize thermal stresses. The height H₃₂₆ of the recess 326 may range, for example, from about 1 to 2 mils. In a preferred embodiment the height H₃₂₆ of the recess 326 ranges from about 1.25 to 1.75 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the recess 326 is located substantially in the center of the bottom surface 324 of the package 302. The first wall 328 of the recess 326 may be located a perpendicular distance ranging, for example, from 80 to 100 mils from the first wall 316 of the cavity 314. In a preferred embodiment, the first wall 328 of the recess 326 is located a perpendicular distance ranging from 85 to 95 mils from the first wall 316 of the cavity 314 in order to optimally minimize thermal stresses. The second wall 330 of the recess 326 may be located a perpendicular distance ranging, for example, from 80 to 100 mils from the second wall 318 of the cavity 314. In a preferred embodiment, the second wall 330 of the recess 326 is located a perpendicular distance ranging from 85 to 95 mils from the second wall 318 of the cavity 314 in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient coupling 308 is located in the recess 326. The resilient coupling 308 may be located a perpendicular distance ranging, for example, from about 2 to 7 mils from the first wall 328 of the recess 326 of the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 2 to 7 mils from the second wall 330 of the recess 326 of the cavity 314 of the package 302. In a preferred embodiment, the resilient coupling 308 is located a perpendicular distance ranging from about 3 to 5 mils from the first wall 328 of the recess 326 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a distance ranging from about 3 to 5 mils from the second wall 330 of the recess 326 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient coupling 308 is coupled to the bottom surface 324 of the recess 326 using conventional solder equipment and processes.

Referring to FIG. 3G, in an alternate embodiment, there is a first bond pad 360 a and a second bond pad 360 b that are substantially equal in size and vertically proximate to each other. The bond pads 360 a and 360 b may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 360 a and 360 b are used for solder bonding in order to optimally provide good manufacturability. The bond pads 360 a and 360 b preferably have an approximately circular cross-sectional shape. The total diameter D₃₆₀ of the bond pads 360 a and 360 b may range, for example, from about 50 to 100 mils. In a preferred embodiment, the total diameter D₃₆₀ of the bond pads 360 a and 360 b ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₆₀ of the bond pads 360 a and 360 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₃₆₀ of the bond pads 360 a and 360 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The first bond pad 360 a is preferably located substantially in the center of the bottom parallel planar surface 340 of the mass 304. The first bond pad 360 a may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first side 342 of the bottom parallel planar surface 340 of the mass 304 and may be located a perpendicular distance ranging, for example, from about 40 to 50 mils from the second side 344 of the bottom parallel planar surface 340 of the mass 304. The first bond pad 360 a is preferably located a perpendicular distance ranging from about 85 to 95 mils from the first side 342 of the bottom parallel planar surface 340 of the mass 304 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 43 to 47 mils from the second side 344 of the bottom parallel planar surface 340 of the mass 304 in order to optimally minimize thermal stresses.

The second bond pad 360 b is preferably located substantially in the center of the bottom parallel planar surface 340 of the mass 304. The second bond pad 360 b may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first side 342 of the bottom parallel planar surface 340 of the mass 304 and may be located a perpendicular distance ranging, for example, from about 135 to 165 mils from the second side 344 of the bottom parallel planar surface 340 of the mass 304. The second bond pad 360 b is preferably located a perpendicular distance ranging from about 85 to 95 mils from the first side 342 of the bottom parallel planar surface 340 of the mass 304 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 143 to 157 mils from the second side 344 of the bottom parallel planar surface 340 of the mass 304 in order to optimally minimize thermal stresses.

Referring to FIG. 3H, in an alternate embodiment, there is a bond pad 306 b. The bond pad 306 b may have an approximately oct-pie-wedge cross-sectional shape. The overall diameter D_(306b) of the bond pad 306 b may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(306b) of the bond pad 306 b ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₀₆ of the bond pad 306 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₃₀₆ of the bond pad 306 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 3J, in an alternate embodiment, there is bond pad 306 c. The bond pad 306 c may have an approximately hollow oct-pie-wedge cross-sectional shape. The overall diameter D_(306c) of the bond pad 306 c may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(306c) of the bond pad 306 c ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₀₆ of the bond pad 306 c may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₃₀₆ of the bond pad 306 c ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 3K, in an alternate embodiment, there is a bond pad 306 d. The bond pad 306 d has an approximately nine-circular cross-sectional shape. The overall diameter D_(306d) of the bond pad 306 d may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(306d) of the bond pad 306 d ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₀₆ of the bond pad 306 d may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₃₀₆ of the bond pad 306 d ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 3L, in an alternate embodiment, there is a single bond pad 306 e. The bond pad 306 e has an approximately starburst cross-sectional shape. The overall diameter D_(306e) of the bond pad 306 e may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(306e) of the bond pad 306 e ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₀₆ of the bond pad 306 e may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₃₀₆ of the bond pad 306 e ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 3M in an alternate embodiment, there is a single bond pad 306 f. The bond pad 306 f has an approximately sunburst cross-sectional shape. The overall diameter D_(306f) of the bond pad 306 f may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(306f) of the bond pad 306 f ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₀₆ of the bond pad 306 f may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₃₀₆ of the bond pad 306 f ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIGS. 3R and 3S, in an alternate embodiment, there is a first resilient coupling 362 a and a second resilient coupling 362 b. In a preferred embodiment, the resilient couplings 362 a and 362 b are solder preforms preferably having an approximately circular cross-sectional shape. The resilient couplings 362 a and 362 b are vertically proximate to each other and substantially equal in size. The resilient couplings 362 a and 362 b may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 362 a and 362 b are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The total diameter D₃₆₂ of the resilient couplings 362 a and 362 b may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D₃₆₂ of the resilient couplings 362 a and 362 b ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₃₆₂ of the resilient couplings 362 a and 362 b may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₃₆₂ of the resilient couplings 362 a and 362 b ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 362 a and 362 b are coupled to the bottom surface 324 of the cavity 314 the package 302 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 362 a and 362 b are coupled to the bond pads 306 using conventional solder equipment and processes.

The first resilient coupling 362 a may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first wall 316 the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 40 to 50 from the second wall 318 of the cavity 314 of the package 302. In a preferred embodiment, the first resilient coupling 362 a is located a perpendicular distance ranging from about 85 to 95 mils from the first wall 316 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a distance ranging from about 43 to 47 mils from the second wall 318 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses.

The first resilient coupling 362 a further includes one or more bumpers 364 for slidingly supporting the mass 304. In a preferred embodiment, there is a single bumper 364. In a preferred embodiment, the bumper 364 has an approximately annular cross-sectional shape. In a preferred embodiment, the bumper 364 is proximate to the bond pads 306. The width W₃₆₄ of the bumper 364 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₃₆₄ of the bumper 364 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

The second resilient coupling 362 b may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first wall 316 the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 135 to 165 mils from the second wall 318 of the cavity 314 of the package 302. In a preferred embodiment, the second resilient coupling 362 b is located a perpendicular distance ranging from about 85 to 95 mils from the first wall 316 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a distance ranging from about 147 to 157 mils from the second wall 318 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses.

The second resilient coupling 362 b further includes one or more bumpers 366 for slidingly supporting the mass 304. In a preferred embodiment, there is a single bumper 366. In a preferred embodiment, the bumper 366 has an approximately annular cross-sectional shape. In a preferred embodiment, the bumper 366 is proximate to the bond pads 306. The width W₃₅₀ of the bumper 366 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₃₆₆ of the bumper 366 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

Referring to FIGS. 3T through 3X, in an alternate embodiment, the system 300 further includes one or more sliding supports 354 a, 354 b, 354 c, or 354 d. The sliding supports 354 a, 354 b, 354 c, or 354 d preferably slidingly support the mass 304. The number of sliding supports 354 a, 354 b, 354 c, or 354 d preferably depends upon having a sufficient amount of sliding supports in order to optimally slidingly support the mass 304. The sliding supports 354 a, 354 b, 354 c, or 354 d are preferably coupled to the bottom surface 324 of the cavity 314 of the package 302. The sliding supports 354 a may have an approximately square cross sectional shape. The sliding supports 354 b may have an approximately rectangular cross sectional shape. The sliding supports 354 c may have an approximately triangular cross sectional shape. The sliding supports 354 d may have an approximately circular cross sectional shape. The sliding supports 354 a, 354 b, 354 c, or 354 d may be, for example, tungsten or ceramic. In a preferred embodiment, the sliding supports 354 a, 354 b, 354 c, or 354 d are tungsten in order to optimally provides standard packaging process. In a preferred embodiment, the sliding supports 354 are coupled to the bottom surface 324 of the cavity 314 of the package 302 using conventional means of integrating the sliding supports 310 into the package 302.

The sliding supports 354 a, 354 b, 354 c, or 354 d may have an approximate cross-sectional area ranging from about 400 to 1600 square mils, individually. In a preferred embodiment, the sliding supports 354 a, 354 b, 354 c, or 354 d have an approximate cross-sectional area ranging from about 625 to 1225 square mils, individually, in order to optimally minimize thermal stresses. The height H₃₅₄ of the sliding supports 354 a, 354 b, 354 c, or 354 d may range, for example, from about 0.5 to 3 mils. In a preferred embodiment, the height H₃₅₄ of the sliding supports 354 a, 354 b, 354 c, or 354 d ranges from about 1 to 1.5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, there is a first sliding support 354 aa, a second sliding support 354 ab, a third sliding support 354 ac, and a fourth sliding support 354 ad. The first sliding support 354 aa may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 316 of the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 318 of the cavity 314 of the package 302. In a preferred embodiment, the first sliding support 354 aa is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 316 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a perpendicular distance from about 90 to 105 mils from the second wall 318 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses.

The second sliding support 354 ab may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 316 of the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 318 of the cavity 314 of the package 362. In a preferred embodiment, the second sliding support 354 ab is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 316 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 318 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses.

The third sliding support 354 ac may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 316 of the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 318 of the cavity 314 of the package 302. In a preferred embodiment, the third sliding support 354 ac is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 316 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 318 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses.

The fourth sliding support 354 ad may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 316 of the cavity 314 of the package 302 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 318 of the cavity 314 of the package 302. In a preferred embodiment, the fourth sliding support 354 ad is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 316 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 90 to 105 mils from the second wall 318 of the cavity 314 of the package 302 in order to optimally minimize thermal stresses.

In an alternate embodiment, the resilient couplings 308 may also electrically couple the mass 304 to the package 302.

In an alternate embodiment, the resilient couplings 362 a and 362 b may also electrically couple the mass 304 to the package 302.

Referring to FIGS. 4A through 4E, an embodiment of a system 400 for resiliently coupling a mass to a package preferably includes a package 402, a mass 404, one or more bond pads 406, one or more resilient couplings 408, and one or more electrical connections 410.

The package 402 is coupled to the resilient couplings 408 and the electrical connections 410. The package 402 may be, for example, a housing or a substrate. In a preferred embodiment, the package 402 is a housing in order to optimally provide a surface mount component. The package 402 preferably includes a first parallel planar surface 412, a second parallel planar surface 414, and a cavity 416. The cavity 416 preferably includes a first wall 418, a second wall 420, a third wall 422 and a fourth wall 424. The first wall 418 and the third wall 422 are preferably approximately parallel to each other and the second wall 420 and the fourth wall 424 are preferably approximately parallel to each other. The second wall 422 and the fourth wall 424 are also preferably perpendicular to the first wall 418 and the third wall 422. The cavity 416 preferably includes a bottom surface 426. The package 402 may be any number of conventional commercially available housings of the type, for example, ceramic, metal, or plastic. In a preferred embodiment, the package 402 is ceramic in order to optimally provide vacuum sealing of the mass 404 within the package 402.

The mass 404 is preferably resiliently attached to the package 402 by the resilient couplings 408 and electrically coupled to the housing by the electrical connections 410. The mass 404 preferably has an approximately rectangular cross-sectional shape. The mass 404 preferably includes all active regions.

In a preferred embodiment, the mass 404 includes a first member 440, a second member 442, and a third member 444. The first member 440 is preferably on top of the second member 442 and the second member 442 is preferably on top of the third member 444. In a preferred embodiment, the first member 440, the second member 442, and the third member 444 are a micro machined sensor substantially as disclosed in copending U.S. patent application Ser. No. 09/936,640, filed on Sep. 12, 2001, the disclosure of which is incorporated herein by reference. The first member 440 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the first member 440 includes a top parallel planar surface 446. The second member 442 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the second member 442 includes a middle parallel planar surface 448. The third member 444 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the third member 444 includes a bottom parallel planar surface 450. The bottom parallel planar surface 450 of the mass 404 preferably includes a first side 452, a second side 454, a third side 456, and a fourth side 458. The first side 452 and the third side 456 are preferably approximately parallel to each other and the second side 454 and the fourth side 458 are preferably approximately parallel to each other and preferably approximately perpendicular to the first side 452 and the third side 456.

In a preferred embodiment, the bottom parallel planar surface 450 of the mass 404 includes the bond pads 406. In a preferred embodiment, the bond pads 406 are substantially located in the center of the bottom parallel planar surface 450 of the mass 404. The bond pads 406 may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first side 452 of the bottom parallel planar surface 450 of the mass 404 and may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the second side 454 of the bottom parallel planar surface 450 of the mass 404. In a preferred embodiment, the bond pads 406 are located a perpendicular distance a ranging from about 85 to 95 mils from the first side 452 of the bottom parallel planar surface 450 of the mass 404 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 85 to 95 mils from the second side 454 of the bottom parallel planar surface 450 of the mass 404 in order to optimally minimize thermal stresses. The bond pads 406 may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 406 are used for solder bonding in order to optimally provide good manufacturability. In a preferred embodiment, the bond pads 406 contact area is maximized in order to optimize the shock tolerance of the mass 404. In a preferred embodiment, the bond pads 406 have minimal discontinuities in order to optimize the distribution of thermal stresses in the mass 404. In several alternate embodiments, there is a plurality of bond pads 406 in order to optimize the relief of thermal stresses in the mass 404. In a preferred embodiment, there is a single bond pad 406 a. The bond pad 406 a preferably has an approximately circular cross-sectional shape. The diameter D_(406a) may range, for example, from about 50 to 100 mils. In a preferred embodiment, the diameter D_(406a) of the bond pad 406 a ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₀₆ of the bond pad 406 a may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₄₁₁, of the bond pad 406 a ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The resilient couplings 408 preferably resiliently attaches the bond pads 406 to the package 402. The resilient couplings 408 are preferably coupled to the bottom surface 426 of the cavity 416. In a preferred embodiment, the resilient couplings 408 are solder preforms. In a preferred embodiment, the resilient couplings 408 have an approximate cross-sectional circular shape. In a preferred embodiment, the resilient couplings 408 have minimal discontinuities in order to optimize the distribution of thermal stresses. In several alternate embodiments, there is a plurality of resilient couplings 408 in order to optimize the relief of thermal stresses in the mass 404. The resilient couplings 408 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 408 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The resilient couplings 408 may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first wall 418 of the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the second wall 420 of the cavity 416 of the package 402. In a preferred embodiment, the resilient couplings 408 are located a perpendicular distance ranging from about 85 to 95 mils from the first wall 418 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a distance ranging from about 85 to 95 mils from the second wall 420 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses. In a preferred embodiment, there is a single resilient coupling 408. The diameter D₄₀₈ of the resilient coupling 408 may range, for example, from about 50 to 100 mils. In a preferred embodiment, the diameter D₄₀₈ of the resilient coupling 408 ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₀₈ of the resilient coupling 408 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₄₀₈ of the resilient coupling 408 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient coupling 408 further includes one or more bumpers 460 for slidingly supporting the mass 404. In a preferred embodiment, there is a single bumper 460. In a preferred embodiment the bumper 460 has an approximately annular cross-sectional shape. In a preferred embodiment, the bumper 460 surrounds the bond pads 406. In a preferred embodiment, the bumper 460 is proximate to the bond pads 406. The width W₄₆₀ of the bumper 460 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₄₆₀ of the bumper 460 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 408 are coupled to the bond pad 406 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 408 are coupled to the bottom surface 426 of the cavity 416 of the package 402 using conventional solder equipment and processes.

The electrical connections 410 preferably electrically couple the mass 404 to the package 402. In a preferred embodiment, the electrical connections 410 are wire bonds. The electrical connections 410 may be any number of conventional commercially available wire bonds of the type, for example, gold or aluminum. In a preferred embodiment, the electrical connections 410 are gold in order to optimally provide compatibility with the package and the mass 404 metallization. In a preferred embodiment, there is a first electrical connection 410 a and a second electrical connection 410 b. The first electrical connection 410 a preferably electrically couples the first parallel planar surface 412 of the package 402 to the top parallel planar surface 446 of the mass 404. The second electrical connection 410 b preferably electrically couples the second parallel planar surface 414 of the package 402 to the middle parallel planar surface 448 of the mass 404. In a preferred embodiment, the electrical connections 410 are coupled to the package 402 using conventional wire-bonding equipment and processes. In a preferred embodiment, the electrical connections 410 are coupled to the mass 404 using conventional wire-bonding equipment and processes.

Referring to FIG. 4F, in an alternate embodiment, the bottom surface 426 of the package 402 preferably further includes a recess 428. The recess 428 may be circular or rectangular in shape. The recess 428 preferably includes a first wall 430, a second wall 432, a third wall 434 and a fourth wall 436. The first wall 430 and the third wall 434 are preferably approximately parallel to each other and the second wall 432 and the fourth wall 436 are preferably approximately parallel to each other. The second wall 432 and the fourth wall 436 are also preferably perpendicular to the first wall 430 and the third wall 434. The recess 428 preferably includes a bottom surface 438. The length L₄₂₈ of the recess 428 may range, for example, from about 110 to 130 mils. In a preferred embodiment the length L₄₂₈ of the recess 428 ranges from about 115 to 125 mils in order to optimally minimize thermal stresses. The width W₄₂₈ of the recess 428 may range, for example, from about 110 to 130 mils. In a preferred embodiment the width W₄₂₈ of the recess 428 ranges from about 115 to 125 mils in order to optimally minimize thermal stresses. The height H₄₂₈ of the recess 428 may range, for example, from about 1 to 2 mils. In a preferred embodiment the height H₄₂₈ of the recess 428 ranges from about 1.25 to 1.75 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the recess 428 is substantially located in the center of the bottom surface 426 of the package 402. The first wall 430 of the recess 428 may be located a perpendicular distance ranging, for example, from 80 to 100 mils from the first wall 418 of the cavity 416. In a preferred embodiment, the first wall 430 of the recess 428 is located a perpendicular distance ranging from 85 to 95 mils from the first wall 418 of the cavity 416 in order to optimally minimize thermal stresses. The second wall 432 of the recess 428 may be located a perpendicular distance ranging, for example, from 80 to 100 mils from the second wall 420 of the cavity 416. In a preferred embodiment, the second wall 432 of the recess 428 is located a perpendicular distance ranging from 85 to 95 mils from the second wall 420 of the cavity 416 in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient coupling 408 is located in the recess 428. The resilient coupling 408 may be located a perpendicular distance ranging, for example, from about 2 to 7 mils from the first wall 430 of the recess 428 of the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 2 to 7 mils from the second wall 432 of the recess 428 of the cavity 416 of the package 402. In a preferred embodiment, the resilient coupling 408 is located a perpendicular distance ranging from about 3 to 5 mils from the first wall 430 of the recess 428 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a distance ranging from about 3 to 5 mils from the second wall 432 of the recess 428 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient coupling 408 is coupled to the bottom surface 438 of the recess 428 using conventional solder equipment and processes.

Referring to FIG. 4G, in an alternate embodiment, there is a first bond pad 468 a and a second bond pad 468 b that are substantially equal in size and vertically proximate to each other. The bond pads 468 a and 468 b may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 468 are used for solder bonding in order to optimally provide good manufacturability. The bond pads 468 preferably have an approximately circular cross-sectional shape. The total diameter D₄₆₈ of the bond pads 468 a and 468 b may range, for example, from about 50 to 100 mils. In a preferred embodiment, the total diameter D₄₆₈ of the bond pads 468 a and 468 b range from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₆₈ of the bond pads 468 a and 468 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₄₆₈ of the bond pads 468 a and 468 b range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The first bond pad 468 a is preferably substantially located in the center of the bottom parallel planar surface 450 of the mass 404. The first bond pad 468 a may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first side 452 of the bottom parallel planar surface 450 of the mass 404 and may be located a perpendicular distance ranging, for example, from about 40 to 50 mils from the second side 454 of the bottom parallel planar surface 450 of the mass 404. The first bond pad 468 a is preferably located a perpendicular distance ranging from about 85 to 95 mils from the first side 452 of the bottom parallel planar surface 450 of the mass 404 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 43 to 47 mils from the second side 454 of the bottom parallel planar surface 450 of the mass 404 in order to optimally minimize thermal stresses.

The second bond pad 468 b is preferably located substantially in the center of the bottom parallel planar surface 450 of the mass 404. The second bond pad 468 b may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first side 452 of the bottom parallel planar surface 450 of the mass 404 and may be located a perpendicular distance ranging, for example, from about 135 to 165 mils from the second side 454 of the bottom parallel planar surface 450 of the mass 404. The second bond pad 468 b is preferably located a perpendicular distance ranging from about 85 to 95 mils from the first side 452 of the bottom parallel planar surface 450 of the mass 404 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 147 to 157 mils from the second side 454 of the bottom parallel planar surface 450 of the mass 404 in order to optimally minimize thermal stresses.

Referring to FIG. 4H, in an alternate embodiment, there is a bond pad 406 b. The bond pad 406 b may have an approximately oct-pie-wedge cross-sectional shape. The diameter D_(4406b) of the bond pad 406 b may range, for example, from about 50 to 100 mils. In a preferred embodiment, the diameter D_(406b) of the bond pad 406 b ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄, of the bond pad 406 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₄₀₆ of the bond pad 406 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 4J, in an alternate embodiment, there is bond pad 406 c. The bond pad 406 c may have an approximately hollow oct-pie-wedge cross-sectional shape. The diameter D_(406c) of the bond pad 406 c may range, for example, from about 50 to 100 mils. In a preferred embodiment, the diameter D_(406c) of the bond pad 406 c ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₀₆ of the bond pad 406 c may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₄₀₆ of the bond pad 406 c ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 4K, in an alternate embodiment, there is a bond pad 406 d. The bond pad 406 d has an approximately nine-circular cross-sectional shape. The overall diameter D_(406d) of the bond pad 406 d may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(406d) of the bond pad 406 d ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₀₆, of the bond pad 406 d may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₄₀₆ of the bond pad 406 d ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 4L, in an alternate embodiment, there is a single bond pad 406 e. The bond pad 406 e has an approximately starburst cross-sectional shape. The overall diameter D_(406e) of the bond pad 406 e may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(406e), of the bond pad 406 e ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₀₆ of the bond pad 406 e may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₄₀₆ of the bond pad 406 e ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 4M, in an alternate embodiment, there is a single bond pad 406 f. The bond pad 406 f has an approximately sunburst cross-sectional shape. The overall diameter D_(406f) of the bond pad 406 f may range, for example, from about 50 to 100 mils. In a preferred embodiment, the overall diameter D_(406f) of the bond pad 406 f ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₀₆ of the bond pad 406 f may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H_(406e) of the bond pad 406 f ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIGS. 4R and 4S, in an alternate embodiment, there is a first resilient coupling 470 a and a second resilient coupling 470 b. In a preferred embodiment, the resilient couplings 470 a and 470 b are solder preforms preferably having an approximately circular cross-sectional shape. The resilient couplings 470 a and 470 b may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 470 a and 470 b are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The total diameter D₄₇₀ of the resilient couplings 470 a and 470 b may range, for example, from about 50 to 100 mils. In a preferred embodiment, the total diameter D₄₇₀ of the resilient couplings 470 a and 470 b ranges from about 70 to 80 mils in order to optimally minimize thermal stresses. The height H₄₇₀ of the resilient couplings 470 a and 470 b may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₄₇₀ of the resilient couplings 470 a and 470 b ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 470 a and 470 b are coupled to the bottom surface 426 of the cavity 416 the package 402 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 470 a and 470 b are coupled to the bond pad 406 using conventional solder equipment and processes.

The first resilient coupling 470 a may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first wall 418 the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 40 to 50 mils from the second wall 420 of the cavity 416 of the package 402. In a preferred embodiment, the first resilient coupling 470 a is located a perpendicular distance ranging from about 85 to 95 mils from the first wall 418 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a distance ranging from about 43 to 47 mils from the second wall 420 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses.

The first resilient coupling 470 a further includes one or more bumpers 472 for slidingly supporting the mass 404. In a preferred embodiment, there is a single bumper 472. In a preferred embodiment the bumper 472 has an approximately annular cross-sectional shape. In a preferred embodiment, the bumper 472 is proximate to the bond pads 406. The width W₄₇₂ of the bumper 472 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₄₇₂ of the bumper 472 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

The second resilient coupling 470 b may be located a perpendicular distance ranging, for example, from about 80 to 100 mils from the first wall 418 the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 135 to 165 mils from the second wall 420 of the cavity 416 of the package 402. In a preferred embodiment, the second resilient coupling 470 b is located a perpendicular distance ranging from about 85 to 95 mils from the first wall 418 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a distance ranging from about 147 to 157 mils from the second wall 420 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses.

The second resilient coupling 470 b further includes one or more bumpers 474 for slidingly supporting the mass 404. In a preferred embodiment, there is a single bumper 474. In a preferred embodiment the bumper 474 has an approximately annular cross-sectional shape. In a preferred embodiment, the bumper 474 is proximate to the bond pads 406. The width W₄₁₄ of the bumper 474 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₄₇₄ of the bumper 474 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

Referring to FIGS. 4T through 4X, in an alternate embodiment, the system 400 further includes one or more sliding supports 462 a, 462 b, 462 c, or 462 d. The sliding supports 462 a, 462 b, 462 c, or 462 d preferably slidingly support the mass 404. The number of sliding supports 462 a, 462 b, 462 c, or 462 d preferably depends upon having a sufficient amount of sliding supports 462 a, 462 b, 462 c, or 462 d in order to optimally slidingly support the mass 404. The sliding supports 462 a, 462 b, 462 c, or 462 d are preferably coupled to the bottom surface 426 of the cavity 416 of the package 402. The sliding supports 462 a may have an approximately square cross sectional shape. The sliding supports 462 b may have an approximately rectangular cross sectional shape. The sliding supports 462 c may have an approximately triangular cross-sectional shape. The sliding supports 462 d may have an approximately circular cross-sectional shape. The sliding supports 462 a, 462 b, 462 c, or 462 d may be, for example, tungsten or ceramic. In a preferred embodiment, the sliding supports 462 a, 462 b, 462 c, or 462 d are tungsten in order to optimally provide a standard packaging process. The total cross-sectional area of the sliding supports 462 a, 462 b, 462 c, or 462 d may range, for example, from about 400 to 1600 square mils, individually. In a preferred embodiment, the total cross-sectional area of the sliding supports 462 a, 462 b, 462 c, or 462 d ranges from about 625 to 1225 square mils, individually, in order to optimally minimize thermal stresses. The height H₄₆₂ of the sliding supports 462 a, 462 b, 462 c, or 462 d may range, for example, from about 0.5 to 3 mils. In a preferred embodiment, the height H₄₆₂ of the sliding supports 462 a, 462 b, 462 c, or 462 d ranges from about 1 to 1.5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, there is a first sliding support 462 aa, a second sliding support 462 ab, a third sliding support 462 ac, and a fourth sliding support 462 ad. The first sliding support 462 aa may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 418 of the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 420 of the cavity 416 of the package 402. In a preferred embodiment, the first sliding support 462 aa is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 418 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a perpendicular distance from about 90 to 105 mils from the second wall 420 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses.

The second sliding support 462 ab may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 418 of the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 420 of the cavity 416 of the package 402. In a preferred embodiment, the second sliding support 462 ab is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 418 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 420 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses.

The third sliding support 462 ac may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 418 of the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 420 of the cavity 416 of the package 402. In a preferred embodiment, the third sliding support 462 ac is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 418 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 420 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses.

The fourth sliding support 462 ad may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 418 of the cavity 416 of the package 402 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 420 of the cavity 416 of the package 402. In a preferred embodiment, the fourth sliding support 462 ad is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 418 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 90 to 105 mils from the second wall 420 of the cavity 416 of the package 402 in order to optimally minimize thermal stresses.

In an alternate embodiment, the resilient couplings 408 may also electrically couple the mass 404 to the package 402.

In an alternate embodiment, the resilient couplings 470 a and 470 b may also electrically couple the mass 404 to the package 402.

Referring to FIGS. 5A through 5G, an alternate embodiment of a system 500 for resiliently coupling a mass to a package preferably includes a package 502, a mass 504, one or more bond pads 506, one or more resilient couplings 508, and one or more electrical connections 510.

The package 502 is coupled to the resilient couplings 508 and the electrical connections 510. The package 502 may be, for example, a housing or a substrate. In a preferred embodiment, the package 502 is a housing in order to optimally provide a surface mount component. The package 502 preferably includes a top parallel planar surface 512 and a cavity 514. The cavity 514 preferably includes a first wall 516, a second wall 518, a third wall 520 and a fourth wall 522. The first wall 516 and the third wall 520 are preferably approximately parallel to each other and the second wall 518 and the fourth wall 522 are preferably approximately parallel to each other. The second wall 518 and the fourth wall 522 are also preferably perpendicular to the first wall 516 and the third wall 520. The cavity 514 preferably includes a bottom surface 524. The package 502 may be any number of conventional commercially available housings of the type, for example, metal, plastic or ceramic. In a preferred embodiment, the package 502 is ceramic in order to optimally provide vacuum sealing of the mass 504 in the package 502.

The mass 504 is preferably resiliently attached to the package 502 by the resilient couplings 508 and electrically coupled to the package 502 by the electrical connections 510. The mass 504 preferably has an approximately rectangular cross-sectional shape. The mass 504 preferably has a passive region 538 on one end and an-active region 540 on the opposite end. In a preferred embodiment, the mass 504 is a micro machined sensor substantially as disclosed in copending U.S. patent application Ser. No. 09/936,640, filed on Sep. 12, 2001, the disclosure of which is incorporated herein by reference.

In a preferred embodiment, the mass 504 includes a top parallel planar surface 526 and a bottom parallel planar surface 528. The bottom parallel planar surface 528 of the mass 504 preferably includes a first side 530, a second side 532, a third side 534, and a fourth side 536. The first side 530 and the third side 534 are preferably approximately parallel to each other and the second side 532 and the fourth side 536 are preferably approximately parallel to each other and preferably approximately perpendicular to the first side 530 and the third side 534.

In a preferred embodiment, the bottom parallel planar surface 528 of the mass 504 includes the bond pads 506. In a preferred embodiment, the bond pads 506 contact area is maximized in order to optimize the shock tolerance of the mass 504. In a preferred embodiment, the bond pads 506 have minimal discontinuities in order to optimize the distribution of thermal stresses in the mass 504. In several alternate embodiments, there is a plurality of bond pads 506 in order to optimize the relief of thermal stresses in the mass 504. In a preferred embodiment, there is a first bond pad 506 a and a second bond pad 506 b. In a preferred embodiment, the first bond pad 506 a is located in the passive region 538 of the bottom parallel planar surface 528 of the mass 504. The first bond pad 506 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 530 of the bottom parallel planar surface 528 of the mass 504 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504. In a preferred embodiment, the first bond pad 506 a is located a perpendicular distance ranging from about 7 to 12 mils from the first side 530 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses.

In a preferred embodiment, the second bond pad 506 b is located in the active region 540 of the bottom parallel planar surface 528 of the mass 504. The second bond pad 506 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third side 534 of the bottom parallel planar surface 528 of the mass 504 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504. In a preferred embodiment, the second bond pad 506 b is located a perpendicular distance ranging from about 7 to 12 mils from the third side 534 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses.

The first bond pad 506 a may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the first bond pad 506 a is used for solder bonding in order to optimally provide good manufacturability. The first bond pad 506 a preferably has an approximately rectangular cross-sectional shape. The length L_(506a) of the first bond pad 506 a may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L_(506a) of the first bond pad 506 a ranges from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W_(506a) of the first bond pad 506 a may range, for example, from about 15 to 25 mils. In a preferred embodiment, the width W_(506a) of the first bond pad 506 a ranges from about 18 to 22 mils in order to optimally minimize thermal stresses. The height H_(506a) of the first bond pad 506 a may range, for example, from about 0.1 to 1 microns. In a preferred embodiment, the height H_(506a) of the first bond pad 506 a ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The second bond pad 506 b may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the second bond pad 506 b is used for solder bonding in order to optimally provide good manufacturability. The second bond pad 506 b preferably has an approximately rectangular cross-sectional shape. The length L_(506b) of the second bond pad 506 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L_(506b) of the second bond pad 506 b ranges from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W_(506b) of the second bond pad 506 b may range, for example, from about 15 to 25 mils. In a preferred embodiment, the width W_(506b) of the second bond pad 506 b ranges from about 18 to 22 mils in order to optimally minimize thermal stresses. The height H_(506b) of the second bond pad 506 b may range, for example, from about 0.1 to 1 microns. In a preferred embodiment, the height H_(506b) of the second bond pad 506 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The resilient couplings 508 preferably resiliently attach the bond pads 506 to the package 502. In a preferred embodiment, the resilient couplings 508 have minimal discontinuities in order to optimize the distribution of thermal stresses. In several alternate embodiments, there is a plurality of resilient couplings 508 in order to optimize the relief of thermal stresses in the mass 504. In a preferred embodiment, the resilient couplings 508 are solder preforms preferably having an approximately rectangular cross-sectional shape. The resilient couplings 508 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 508 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The resilient couplings 508 are preferably coupled to the bottom surface 524 of the cavity 514.

In a preferred embodiment, there is a first resilient coupling 508 a and a second resilient coupling 508 b. The length L_(508b) of the first resilient coupling 508 a may range, for example, from about 200 to 250 mils. In a preferred embodiment, the length L_(508a) of the first resilient coupling 508 a ranges from about 225 to 235 mils in order to optimally minimize thermal stresses. The width W_(508a) of the first resilient coupling, 508 a may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W_(508a) of the first resilient coupling 508 a ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H_(508a) of the first resilient coupling 508 a may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H_(508a), of the first resilient coupling 508 a ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

The length L_(508b) of the second resilient coupling 508 b may range, for example, from about 200 to 250 mils. In a preferred embodiment, the length L_(508b) of the second resilient coupling 508 b ranges from about 225 to 235 mils in order to optimally minimize thermal stresses. The width W_(508b) of the second resilient coupling 508 b may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W_(508b) of the second resilient coupling 508 b ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H_(508b) of the second resilient coupling 508 b may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H_(508b) of the second resilient coupling 508 b ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

The first resilient coupling 508 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 516 of the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from 5 to 25 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the first resilient coupling 508 a is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 516 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The second resilient coupling 508 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third wall 520 of the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the second resilient coupling 508 b is located a perpendicular distance ranging from about 7 to 12 mils from the third wall 520 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

In a preferred embodiment, the first resilient coupling 508 a further includes a first bumper 542 and a second bumper 544 for slidingly supporting the mass 504. In a preferred embodiment, the first bumper 542 of the first resilient coupling 508 a is located on one side of the first bond pad 506 a and the second bumper 544 of the first resilient coupling 508 a is located on another side of the first bond pad 506 a. In a preferred embodiment, the first bumper 542 of the first resilient coupling 508 a and the second bumper 544 of the first resilient coupling 508 a are proximate to the first bond pad 506 a. The width W₅₄₂ of the first bumper 542 of the first resilient coupling 508 a may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₄₂ of the first bumper 542 of the first resilient coupling 508 a ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. The width W₅₄₄ of the second bumper 544 of the first resilient coupling 508 a may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₄₄ of the second bumper 544 of the first resilient coupling 508 a ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the second resilient coupling 508 b further includes a first bumper 546 and a second bumper 548 for slidingly supporting the mass 504. In a preferred embodiment, the first bumper 546 of the second resilient coupling 508 b is located on one side of the second bond pad 506 b and the second bumper 548 of the second resilient coupling 508 b is located on another side of the second bond pad 506 b. In a preferred embodiment, the first bumper 546 of the second resilient coupling 508 b and the second bumper 548 of the second resilient coupling 508 b are proximate to the second bond pad 506 b. The width W₅₄₆ of the first bumper 546 of the second resilient coupling 508 b may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₄₆ of the first bumper 546 of the second resilient coupling 508 b ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. The width W₅₄₈ of the second bumper 548 of the second resilient coupling 508 b may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₄₈ of the second bumper 548 of the second resilient coupling 508 b ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 508 a and 508 b are coupled to the bond pads 506 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 508 a and 508 b are coupled to the bottom surface 524 of the cavity 514 of the package 502 using conventional solder equipment and processes.

The electrical connections 510 preferably electrically couple the mass 504 to the package 502. In a preferred embodiment, there is a single electrical connection 510. The electrical connection 510 preferably electrically couples the top parallel planar surface 512 of the package 502 to the top parallel planar surface 526 of the mass 504. In a preferred embodiment, the electrical connection 512 is a wire bond. The electrical connection 512 may be any number of conventional commercially available wire bonds of the type, for example, gold or aluminum. In a preferred embodiment, the electrical connection 512 is gold in order to optimally provide compatibility to the package 502 and the mass 504 metallization. In a preferred embodiment, the electrical connection 512 is coupled to the package 502 using conventional wire-bonding equipment and processes. In a preferred embodiment, the electrical connection 512 is coupled to the mass 504 using conventional wire-bonding equipment and processes.

Referring to FIG. 5H, in an alternate embodiment, the mass 504 further includes a second passive region 552 at the opposite end of the bottom parallel planar surface of the mass 504 from the passive region 538. The active region 540 is preferably located between the passive region 538 and the second passive region 552. In a preferred embodiment, the second bond pad 506 b is located in the second passive region 552.

Referring to FIG. 5J, in an alternate embodiment, there are one or more bond pads 562 and one or more bond pads 564. In a preferred embodiment there is a first bond pad 562 a and a second bond pad 562 b. The bond pads 562 a and 562 b are substantially equal in size and vertically horizontally proximate to each other. The bond pads 562 a and 562 b may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 562 a and 562 b are used for solder bonding in order to provide good manufacturability. The bond pads 562 a and 562 b preferably have an approximately rectangular cross-sectional shape. The length L₅₆₂ of the bond pads 562 a and 562 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L₅₆₂ of the bond pads 562 a and 562 b range from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W₅₆₂ of the bond pads 562 a and 562 b may range, for example, from about 10 to 20 mils. In a preferred embodiment, the width W₅₆₂ of the bond pads 562 a and 562 b range from about 13 to 18 mils in order to optimally minimize thermal stresses. The height H₅₀₂ of the bond pads 562 a and 562 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₆₂ of the bond pads 562 a and 562 b range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

In a preferred embodiment, the first bond pad 562 a is preferably located in the passive region 538 the bottom parallel planar surface 528 of the mass 504. The first bond pad 562 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 530 of the bottom parallel planar surface 528 of the mass 504 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 532 of the bottom parallel planar surface 530 of the mass 504. The first bond pad 562 a is preferably located a perpendicular distance ranging from about 7 to 12 mils from the first side 530 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses.

In a preferred embodiment, the second bond pad 562 b is located in the passive region 538 of the bottom parallel planar surface 528 of the mass 504. The second bond pad 562 b may be located a perpendicular distance ranging, for example, from about 15 to 45 mils from the first side 530 of the bottom parallel planar surface 528 of the mass 504 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504. The second bond pad 562 b is preferably located a perpendicular distance ranging from about 20 to 30 mils from the first side 530 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses.

In a preferred embodiment, there is a third bond pad 564 a and a fourth bond pad 564 b. The bond pads 564 a and 564 b may be used for solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 564 are used for solder bonding in order to optimally provide good manufacturability. The bond pads 564 a and 564 b preferably have an approximately rectangular cross-sectional shape. The length Ls, of the bond pads 564 a and 564 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L₅₆₄ of the bond pads 564 a and 564 b range from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W₅₆₄ of the bond pads 564 a and 564 b may range, for example, from about 10 to 20 mils. In a preferred embodiment, the width W₅₆₄ of the bond pads 564 a and 564 b range from about 13 to 18 mils in order to optimally minimize thermal stresses. The height H₅₆₄ of the bond pads 564 a and 564 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₆₄ of the bond pads 564 a and 564 b range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

In a preferred embodiment, the third bond pad 564 a is located in the active region 540 of the bottom parallel planar surface 528 of the mass 504. The third bond pad 564 a may be located a perpendicular distance ranging, for example, from about 15 to 45 mils from the third side 534 of the bottom parallel planar surface 528 of the mass 504 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504. The third bond pad 564 a is preferably located a perpendicular distance ranging from about 20 to 30 mils from the third side 534 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses.

The fourth bond pad 564 b is preferably located in the active region 540 of the bottom parallel planar surface 528 of the mass 504. The fourth bond pad 564 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third side 534 of the bottom parallel planar surface 528 of the mass 504 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504. The fourth bond pad 564 b is preferably located a perpendicular distance ranging from about 7 to 12 mils from the third side 534 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 532 of the bottom parallel planar surface 528 of the mass 504 in order to optimally minimize thermal stresses.

In an alternate embodiment, the third bond pad 564 a and the fourth bond pad 564 b are located in the second passive region 552 of the mass 504.

Referring to FIG. 5K through 5S, in several alternate embodiments, a bond pad 506 c, a pair of bond pads 506 d and 506 e, a bond pad 506 f, a bond pad 506 g, a pair of bond pads 506 h and 506 i, a trio of bond pads 506 j and 506 k and 506 l, a bond pad 506 m, and a pair of bond pads 506 n and 506 o may be substantially substituted for each of the bond pads 506 a and 506 b described above with reference to FIG. 5A.

Referring to FIG. 5K, the bond pad 506 c may have an approximately oval cross-sectional shape. The bond pad 506 c may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils, individually. In a preferred embodiment, the bond pad 506 has an approximate cross-sectional area ranging from about 5625 to 7050 square mils, individually, in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pad 506 c may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₀₆ of the bond pads 506 range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 5L, in an alternate embodiment, the bond pads 506 d and 506 e are substantially equal in size, vertically proximate to each other, and have an approximately oval cross-sectional shape. The bond pads 506 d and 506 e may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 506 d and 506 e have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pads 506 d and 506 e may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₀₆ of the bond pads 506 d and 506 e ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 5M, in an alternate embodiment, the bond pad 506 f has an approximately tri-oval cross-sectional shape. The bond pad 506 f may have approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 506 f has an approximate cross-sectional area ranging from about 5625 to 8750 square mils in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pad 506 f may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₀₆ of the bond pad 506 f ranges from 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 5N, in an alternate embodiment, the bond pad 506 g has an approximately oct-oval cross-sectional shape. The bond pad 506 g may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 506 g have an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pad 506 g may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₀₆ of the bond pad 506 g range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 5P, in an alternate embodiment, the bond pads 506 h and 506 i are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 506 h and 506 i may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 506 h and 506 i have an approximate total cross-sectional area ranging from about 5625 to 8750 square mils in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pads 506 h and 506 i may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₀₆ of the bond pads 506 h and 506 i range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 5Q, in an alternate embodiment, the bond pads 506 j, 506 k, and 506 l are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 506 j, 506 k, and 506 l may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 506 j, 506 k, and 506 l have an approximate total cross-sectional area ranging from about 5625 to 8750 square mils in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pads 506 j, 506 k, and 506 l may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₀₆ of the bond pads 506 j, 506 k, and 506 l range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 5R in an alternate embodiment, the bond pad 506 m may have an approximately wavy sided rectangular cross-sectional shape. The bond pad 506 m may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 506 m have an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pad 506 m may range, for example, from about 0.1 to 1 microns. In a preferred embodiment, the height H₅₀₆ of the bond pad 506 m range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 5S, in an alternate embodiment, the bond pads 506 n and 506 o are horizontally proximate to each other and have an approximately rectangular cross-sectional shape. The bond pad 506 n is approximately smaller in size than the bond pad 506 o. The bond pads 506 n and 506 o may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 506 n and 506 o have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₅₀₆ of the bond pads 506 n and 506 o may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₅₀₆ of the bond pads 506 n and 506 o range from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIGS. 5T through 5W, in an alternate embodiment, there are one or more resilient couplings 566 and one or more resilient couplings 568. In a preferred embodiment, the resilient couplings 566 are solder preforms preferably having an approximately rectangular cross-sectional shape. The resilient couplings 566 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 566 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The length L₅₆₆ of the resilient couplings 566 may range, for example, from about 90 to 120 mils. In a preferred embodiment, the length L₅₆₆ of the resilient couplings 566 ranges from about 101 to 112 mils in order to optimally minimize thermal stresses. The width W₅₆₆ of the resilient couplings 566 may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W₅₆₆ of the resilient couplings 566 ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₅₆₆ of the resilient couplings 566 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₅₆₆ of the resilient couplings 566 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 566 are coupled to the bottom surface 524 of the cavity 514 the package 502 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 566 are coupled to the bond pads 506 using conventional solder equipment and processes. In a preferred embodiment, there is a first resilient coupling 566 a and a second resilient coupling 566 b.

The first resilient coupling 566 a be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 516 the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the first resilient coupling 566 a is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 516 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The first resilient coupling 566 a further includes one or more first bumpers 554 for slidingly supporting the mass 504. In a preferred embodiment, the first bumpers 554 are located on both sides of the first bond pad 506 a. In a preferred embodiment, the first bumpers 554 are proximate to the first bond pad 506 a. The width W₅₅₄ of the first bumpers 554 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₅₄ of the first bumpers 554 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

The second resilient coupling 566 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 516 the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 105 to 145 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the second resilient coupling 566 b is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 516 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a distance ranging from about 112 to 127 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The second resilient coupling 566 b further includes one or more second bumpers 556 for slidingly supporting the mass 504. In a preferred embodiment, the second bumpers 556 are located on one side of the first bond pad 506 a. In a preferred embodiment, the second bumpers 556 are proximate to the first bond pad 506 a. The width W₅₅₆ of the second bumpers 556 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₅₆, of the second bumpers 556 range from about 3 to 5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient couplings 568 are solder preforms preferably having an approximately rectangular cross-sectional shape. The resilient couplings 568 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 568 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The length L₅₆₈ of the resilient couplings 568 may range, for example, from about 90 to 120 mils. In a preferred embodiment, the length L₅₆₈ of the resilient couplings 568 ranges from about 101 to 112 mils in order to optimally minimize thermal stresses. The width W₅₆₈ of the resilient couplings 568 may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W₅₆₈ of the resilient couplings 568 ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₅₆₈ of the resilient couplings 568 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₅₆₈ of the resilient couplings 568 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 568 are coupled to the bottom surface 524 of the cavity 514 the package 502 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 568 are coupled to the bond pads 506 using conventional solder equipment and processes. In a preferred embodiment, there is a third resilient coupling 568 a and a fourth resilient coupling 568 b.

The third resilient coupling 568 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third wall 520 the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the third resilient coupling 568 a is located a perpendicular distance ranging from about 7 to 12 mils from the third wall 520 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The third resilient coupling 568 a further includes one or more third bumpers 558 for slidingly supporting the mass 504. In a preferred embodiment, the third bumpers 558 are located on both sides of the second bond pad 506 b In a preferred embodiment, the third bumpers 558 are proximate to the second bond pad 506 b. The width W₅₅₈ of the third bumpers 558 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₅₈ of the third bumpers 558 range from about 3 to 5 mils in order to optimally minimize thermal stresses.

The fourth resilient coupling 568 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third wall 520 the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 105 to 145 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the fourth resilient coupling 568 b is located a perpendicular distance ranging from about 7 to 12 mils from the third wall 520 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a distance ranging from about 112 to 127 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The fourth resilient coupling 568 b further includes one or more fourth bumpers 560 for slidingly supporting the mass 504. In a preferred embodiment, the fourth bumpers 560 are located on both sides of the second bond pad 506 b. In a preferred embodiment, the fourth bumpers 560 are proximate to the second bond pad 506 b. The width W₅₆₀ of the fourth bumpers 560 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₅₆₀ of the fourth bumpers 560 ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

Referring to FIGS. 5X through 5BB, in an alternate embodiment, the system 500 further includes one or more sliding supports 550 a, 550 b, 550 c, or 550 d. The sliding supports 550 a, 550 b, 550 c, or 550 d preferably slidingly support the mass 504. The sliding supports 550 a, 550 b, 550 c, or 550 d are preferably coupled to the bottom surface 524 of the cavity 514 of the package 502. The number of sliding supports 550 a, 550 b, 550 c, or 550 d preferably depends upon having a sufficient amount of sliding supports in order to optimally slidingly support the mass 504. The sliding supports 550 a may have an approximately square cross sectional shape. The sliding supports 550 b may have an approximately rectangular cross sectional shape. The sliding supports 550 c may have an approximately triangular cross sectional shape. The sliding supports 550 d may have an approximately circular cross sectional shape. The sliding supports 550 a, 550 b, 550 c, or 550 d may be, for example, tungsten or ceramic. In a preferred embodiment, the sliding supports 550 a, 550 b, 550 c, or 550 d are tungsten in order to optimally provide a standard packaging process. The cross-sectional area of the sliding supports 550 a, 550 b, 550 c, or 550 d may range, for example, from about 400 to 1600 square mils, individually. In a preferred embodiment, the cross-sectional area of the sliding supports 550 a, 550 b, 550 c, or 550 d may range, for example, from about 625 to 1225 square mils, individually, in order to optimally minimize thermal stresses. The height H₅₅₀ of the sliding supports 550 a, 550 b, 550 c, or 550 d may range, for example, from about 0.5 to 3 mils. In a preferred embodiment, the height H₅₅₀ of the sliding supports 550 a, 550 b, 550 c, or 550 d ranges from about 1 to 1.5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, there is a first sliding support 550 aa, a second sliding support 550 ab, a third sliding support 550 ac, and a fourth sliding support 550 ad. The first sliding support 550 aa may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 516 of the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the first sliding support 550 aa is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 516 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a perpendicular distance from about 90 to 105 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The second sliding support 550 ab may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 516 of the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the second sliding support 550 ab is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 516 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The third sliding support 550 ac may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 516 of the cavity 514 of the package 509 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the third sliding support 550 ac is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 516 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

The fourth sliding support 550 ad may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 516 of the cavity 514 of the package 502 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 518 of the cavity 514 of the package 502. In a preferred embodiment, the fourth sliding support 550 ad is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 516 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 90 to 105 mils from the second wall 518 of the cavity 514 of the package 502 in order to optimally minimize thermal stresses.

In an alternate embodiment, the resilient couplings 508 may also electrically couple the mass 504 to the package 502.

In an alternate embodiment, the resilient couplings 566 and 568 may also electrically couple the mass 504 to the package 502.

Referring to FIGS. 6A through 6G, an alternate embodiment of a system 600 for resiliently coupling a mass to a package preferably includes a package 602, a mass 604, one or more bond pads 606, one or more resilient couplings 608, and one or more electrical connections 610.

The package 602 is preferably coupled to the resilient couplings 608 and the electrical connections 610. The package 602 may be, for example, a housing or a substrate. In a preferred embodiment, the package 602 is a housing in order to optimally provide a surface mount component. The package 602 preferably includes a first parallel planar surface 612, a second parallel planar surface 614 and a cavity 616. The cavity 616 preferably includes a first wall 618, a second wall 620, a third wall 622 and a fourth wall 624. The first wall 618 and the third wall 622 are preferably approximately parallel to each other and the second wall 620 and the fourth wall 624 are preferably approximately parallel to each other. The second wall 620 and the fourth wall 624 are also preferably perpendicular to the first wall 618 and the third wall 622. The cavity 616 preferably includes a bottom surface 626. The package 602 may be any number of conventional commercially available housings of the type, for example, metal, ceramic or plastic. In a preferred embodiment, the package 602 is ceramic in order to optimally provide vacuum sealing of the mass 604 in the package 602.

The mass 604 is preferably resiliently attached to the package 602 by the resilient couplings 608 and electrically coupled to the package 602 by the electrical connections 610. The mass 604 preferably has an approximately rectangular cross-sectional shape. The mass 604 preferably includes a passive region 648 on one end and an active region 650 on the opposite end.

In a preferred embodiment, the mass 604 includes a first member 628, a second member 630, and a third member 632. The first member 628 is preferably on top of the second member 630 and the second member 630 is preferably on top of the third member 632. In a preferred embodiment, the first member 628, the second member 630, and the third member 632 are a micro machined sensor substantially as disclosed in copending U.S. patent application Ser. No. 09/936,640, Sep. 12, 2001, the disclosure of which is incorporated herein by reference.

The first member 628 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the first member 628 includes a top parallel planar surface 634. The second member 630 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the second member 630 includes a middle parallel planar surface 636. The third member 632 preferably includes one or more parallel planar surfaces. In a preferred embodiment, the third member 632 includes a bottom parallel planar surface 638. The bottom parallel planar surface 638 of the mass 604 preferably includes a first side 640, a second side 642, a third side 644, and a fourth side 646. The first side 640 and the third side 644 are preferably approximately parallel to each other and the second side 642 and the fourth side 646 are preferably approximately parallel to each other and preferably approximately perpendicular to the first side 640 and the third side 644.

In a preferred embodiment, the bottom parallel planar surface 638 of the mass 604 includes the bond pads 606. In a preferred embodiment, the bond pads 606 contact area is maximized in order to optimize the shock tolerance of the mass 604. In a preferred embodiment, the bond pads 606 have minimal discontinuities in order to optimize the distribution of thermal stresses in the mass 604. In several alternate embodiments, there is a plurality of bond pads 606 in order to optimize the relief of thermal stresses in the mass 604. In a preferred embodiment, there is a first bond pad 606 a and a second bond pad 606 b. In a preferred embodiment, the first bond pad 606 a is located in the passive region 648 of the bottom parallel planar surface 638 of the mass 604. The first bond pad 606 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 640 of the bottom parallel planar surface 638 of the mass 604 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604. In a preferred embodiment, the first bond pad 606 a is located a perpendicular distance ranging from about 7 to 12 mils from the first side 640 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses.

In a preferred embodiment, the second bond pad 606 b is located in the active region 650 of the bottom parallel planar surface 638 of the mass 604. The second bond pad 606 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third side 644 of the bottom parallel planar surface 638 of the mass 604 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604. In a preferred embodiment, the second bond pad 606 b is located a perpendicular distance ranging from about 7 to 12 mils from the third side 644 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses.

The first bond pad 606 a may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the first bond pad 606 a is used for solder bonding in order to optimally provide good manufacturability. The first bond pad 606 a preferably has an approximately rectangular cross-sectional shape. The length L_(606a) of the first bond pad 606 a may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L_(606a) of the first bond pad 606 a ranges from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W_(606A) of the first bond pad 606 a may range, for example, from about 15 to 25 mils. In a preferred embodiment, the width W_(606a) of the first bond pad 606 a ranges from about 18 to 22 mils in order to optimally minimize thermal stresses. The height H_(606e) of the first bond pad 606 a may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H_(606a) of the first bond pad 606 a ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The second bond pad 606 b may, for example, be used for solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the second bond pad 606 b is used for solder bonding in order to optimally provide solderability. The second bond pad 606 b preferably has an approximately rectangular cross-sectional shape. The length L_(606b) of the second bond pad 606 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L_(606b) of the second bond pad 606 b ranges from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W_(606b) of the second bond pad 606 b may range, for example, from about 15 to 25 mils. In a preferred embodiment, the width W_(606b) of the second bond pad 606 b ranges from about 18 to 22 mils in order to optimally minimize thermal stresses. The height H_(506b) of the second bond pad 606 b may range, for example, from about 0.1 to 1 microns. In a preferred embodiment, the height H_(606b) of the second bond pad 606 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The resilient couplings 608 preferably resiliently attach the bond pads 606 to the package 602. In a preferred embodiment, the resilient couplings 608 have minimal discontinuities in order to optimize the distribution of thermal stresses. In several alternate embodiments, there is a plurality of resilient couplings 608 in order to optimize the relief of thermal stresses in the mass 604. In a preferred embodiment, the resilient couplings 608 are solder preforms preferably having an approximately rectangular cross-sectional shape. In a preferred embodiment, the resilient couplings 608 are coupled to the bottom surface 626 of the cavity 616. The resilient couplings 608 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 608 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature.

In a preferred embodiment, there is a first resilient coupling 608 a and a second resilient coupling 608 b. The length L_(608a) of the first resilient coupling 608 a may range, for example, from about 200 to 250 mils. In a preferred embodiment, the length L_(608a) of the first resilient coupling 608 a ranges from about 225 to 235 mils in order to optimally minimize thermal stresses. The width W_(608a) of the first resilient coupling 608 a may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W_(606a) of the first resilient coupling 608 a ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H_(606a) of the first resilient coupling 608 a may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H_(608a) of the first resilient coupling 608 a ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

The length L_(608b) of the second resilient coupling 608 b may range, for example, from about 200 to 250 mils. In a preferred embodiment, the length L_(608b) of the second resilient coupling 608 b ranges from about 225 to 235 mils in order to optimally minimize thermal stresses. The width W_(608b) of the second resilient coupling 608 b may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W_(608b) of the second resilient coupling 608 b ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H_(608b) of the second resilient coupling 608 b may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H_(608b) of the second resilient coupling 608 b ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses.

The first resilient coupling 608 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 618 of the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the first resilient coupling 608 a is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 618 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The second resilient coupling 608 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third wall 622 of the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the second resilient coupling 608 b is located a perpendicular distance ranging from about 7 to 12 mils from the third wall 622 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

In a preferred embodiment, the first resilient coupling 608 a further includes a first bumper 652 and a second bumper 654 for slidingly supporting the mass 604. In a preferred embodiment, the first bumper 652 of the first resilient coupling 608 a is located on one side of the first bond pad 606 a and the second bumper 654 of the first resilient coupling 608 a is located on another side of the first bond pad 606 a. In a preferred embodiment, the first bumper 652 of the first resilient coupling 608 a and the second bumper 654 of the first resilient coupling 608 a are proximate to the first bond pad 606 a. The width W₆₅₂ of the first bumper 652 of the first resilient coupling 608 a may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₅₂ of the first bumper 652 of the first resilient coupling 608 a ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. The width W₆₅₄ of the second bumper 654 of the first resilient coupling 608 a may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₅₄ of the second bumper 654 of the first resilient coupling 608 a ranges from about 3 to 5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the second resilient coupling 608 b further includes a first bumper 656 and a second bumper 658 for slidingly supporting the mass 604. In a preferred embodiment, the first bumper 656 of the second resilient coupling 608 b is located on one side of the second bond pad 606 b and the second bumper 658 of the second resilient coupling 608 b is located on another side of the second bond pad 606 b. In a preferred embodiment, the first bumper 656 of the second resilient coupling 608 b and the second bumper 658 of the second resilient coupling 608 b are proximate to the second bond pad 606 b. The width W₆₅₆ of the first bumper 656 of the second resilient coupling 608 b may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₅₆ of the first bumper 656 of the second resilient coupling 608 b ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. The width W₆₅₆ of the second bumper 658 of the second resilient coupling 608 b may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₅₈ of the second bumper 658 of the second resilient coupling 608 b ranges from about 3 to 5 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 608 are coupled to the bond pads 606 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 608 are coupled to the bottom surface 626 of the cavity 616 of the package 602 using conventional solder equipment and processes.

The electrical connections 610 preferably electrically couple the mass 604 to the package 602. In a preferred embodiment, the electrical connections 610 are wire bonds. The electrical connections 610 may be any number of conventional commercially available wire bonds of the type, for example, gold or aluminum. In a preferred embodiment, the electrical connections 610 are gold in order to optimally provide compatibility with the package 602 and the mass 604 metallization. In a preferred embodiment, there is a first electrical connection 610 a and a second electrical connection 610 b. The first electrical connection 610 a preferably electrically couples the first parallel planar surface 612 of the package 602 to the top parallel planar surface 634 of the mass 404. The second electrical connection 610 b preferably electrically couples the second parallel planar surface 614 of the package 602 to the middle parallel planar surface 636 of the mass 604. In a preferred embodiment, the electrical connections 610 are coupled to the package 602 using conventional wire-bonding equipment and processes. In a preferred embodiment, the electrical connections 610 are coupled to the mass 604 using conventional wire-bonding equipment and processes.

Referring to FIG. 6H, in an alternate embodiment, the mass 604 further includes a second passive region 662 at the opposite end of the bottom parallel planar surface 638 of the mass 604 from the passive region 648. The active region 650 is preferably located between the passive region 648 and the second passive region 662. In a preferred embodiment, the second bond pad 606 b is located in the second passive region 662.

Referring to FIG. 6J, in an alternate embodiment, there are one or more bond pads 672 and one or more bond pads 674. In a preferred embodiment, there is a first bond pad 672 a and a second bond pad 672 b. The bond pads 672 a and 672 b are preferably substantially equal and horizontally proximate to each other. The bond pads 672 a and 672 b may be used for, for example, solder, glass frit, non-conductive epoxy, or conductive epoxy bonding. In a preferred embodiment, the bond pads 672 are used for solder bonding in order to optimally provide good manufacturability. The bond pads 672 a and 672 b preferably have an approximately rectangular cross-sectional shape. The length L₆₇₂ of the bond pads 672 a and 672 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L₆₇₂ of the bond pads 672 a and 672 b range from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W₆₇₂ of the bond pads 672 a and 672 b may range, for example, from about 10 to 20 mils. In a preferred embodiment, the width W₆₇₂ of the bond pads 672 a and 672 b range from about 13 to 18 mils in order to optimally minimize thermal stresses. The height H₆₇₂ of the bond pads 672 a and 672 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₇₂ of the bond pad 672 a and 672 b ranges from about 0.24 to 0.72 microns in order to minimize thermal stresses.

The first bond pad 672 a is preferably located in the passive region 648 the bottom parallel planar surface 638 of the mass 604. The first bond pad 672 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first side 640 of the bottom parallel planar surface 638 of the mass 604 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604. The first bond pad 672 a is preferably located a perpendicular distance ranging from about 7 to 12 mils from the first side 640 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses.

The second bond pad 672 b is preferably located in the passive region 648 of the bottom parallel planar surface 638 of the mass 604. The second bond pad 672 b may be located a perpendicular distance ranging, for example, from about 15 to 45 mils from the first side 640 of the bottom parallel planar surface 638 of the mass 604 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604. The second bond pad 672 b is preferably located a perpendicular distance ranging from about 20 to 30 mils from the first side 640 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 5 to 25 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses.

In a preferred embodiment, there is a third bond pad 674 a and a fourth bond pad 674 b. The bond pads 674 a and 674 b are preferably substantially equal in size and horizontally proximate to each other. The bond pads 674 a and 674 b may be used for, for example, solder, glass frit, conductive epoxy, or non-conductive epoxy bonding. In a preferred embodiment, the bond pads 674 a and 674 b are used for solder bonding in order to optimally provide good manufacturability. The bond pads 674 a and 674 b preferably have an approximately rectangular cross-sectional shape. The length L₆₇₄ of the bond pads 674 a and 674 b may range, for example, from about 180 to 240 mils. In a preferred embodiment, the length L₆₇₄ of the bond pads 674 a and 674 b range from about 200 to 220 mils in order to optimally minimize thermal stresses. The width W₆₇₄ of the bond pads 674 a and 674 b may range, for example, from about 10 to 20 mils. In a preferred embodiment, the width W₆₇₄ of the bond pads 674 a and 674 b range from about 13 to 18 mils in order to optimally minimize thermal stresses. The height H₆₇₄ of the bond pads 674 a and 674 b may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₇₄ of the bond pad 674 a and 674 b ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

The third bond pad 674 a is preferably located in the active region 650 of the bottom parallel planar surface 638 of the mass 604. The third bond pad 674 a may be located a perpendicular distance ranging, for example, from about 15 to 45 mils from the third side 644 of the bottom parallel planar surface 638 of the mass 604 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604. The third bond pad 674 a is preferably located a perpendicular distance ranging from about 20 to 30 mils from the third side 644 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses.

The fourth bond pad 674 b is preferably located in the active region 650 of the bottom parallel planar surface 638 of the mass 604. The fourth bond pad 674 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third side 644 of the bottom parallel planar surface 638 of the mass 604 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604. The fourth bond pad 674 b is preferably located a perpendicular distance ranging from about 7 to 12 mils from the third side 644 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 7 to 12 mils from the second side 642 of the bottom parallel planar surface 638 of the mass 604 in order to optimally minimize thermal stresses.

In an alternate embodiment, the third bond pad 674 a and the fourth bond pad 674 b are located in the second passive region 662. Referring to FIGS. 6K through 6S, in an alternate embodiment, a bond pad 606 c, a pair of bond pads 606 d and 606 e, a bond pad 606 f, a bond pad 606 g, a pair of bond pads 606 h and 606 i, a trio of bond pads 606 j and 606 k and 606 l, a bond pad 606 m, and a pair of bond pads 606 n and 606 o may be substantially substituted for each of the bond pads 606 a and 606 b described above with reference to FIG. 6A.

Referring to FIG. 6K, in an alternate embodiment, the bond pad 606 c may have an approximately oval cross-sectional shape. The bond pad 606 c may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils, individually. In a preferred embodiment, the bond pad 606 c have an approximate cross-sectional area ranging from about 5625 to 7050 square mils, individually, in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pad 606 c may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₀₆ of the bond pad 606 c ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 6L, in an alternate embodiment, the bond pads 606 e and 606 d are substantially equal in size, vertically proximate to each other, and have an approximately oval cross-sectional shape. The bond pads 606 e and 606 d may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 606 e and 606 d have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pads 606 e and 606 d may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₀₆ of the bond pad 606 e and 606 d ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 6M, in an alternate embodiment, the bond pad 606 f has an approximately tri-oval cross-sectional shape. The bond pad 606 f may have approximate cross-sectional area ranging from about 4000 to 8750 square mils, individually. In a preferred embodiment, the bond pad 606 f have an approximate cross-sectional area ranging from about 5625 to 7050 square mils, individually, in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pad 606 f may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₀₆ of the bond pad 606 f ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 6N, in an alternate embodiment, the bond pad 606 g has an approximately oct-oval cross-sectional shape. The bond pad 606 g may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pad 606 g has an approximate cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pad 606 g may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₀₆ of the bond pad 606 g ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 6P, in an alternate embodiment, the bond pads 606 h and 606 i are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 606 h and 606 i may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 606 h and 606 i have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pads 606 h and 606 i may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₀₆ of the bond pad 606 h and 606 i ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 6Q, in an alternate embodiment, the bond pads 606 j 606 k, and 606 l are substantially equal in size, vertically proximate to each other, and have an approximately rectangular cross-sectional shape. The bond pads 606 j 606 k, and 606 l may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 606 j 606 k, and 606 l have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pads 606 j 606 k, and 606 l may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height 606 of the bond pad 606 j 606 k, and 606 l ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 6R in an alternate embodiment, the bond pad 606 m may have an approximately wavy sided rectangular cross-sectional shape. The bond pad 606 m may have an approximate cross-sectional area ranging from about 4000 to 8750 square mils, individually. In a preferred embodiment, the bond pad 606 m have an approximate cross-sectional area ranging from about 5625 to 7050 square mils, individually, in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pad 606 m may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₀₆ of the bond pad 606 m ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIG. 6S, in an alternate embodiment, the bond pads 606 n and 606 o are horizontally proximate to each other and have an approximately rectangular cross-sectional shape. The bond pad 606 n is approximately smaller in size than the bond pad 606 o. The bond pads 606 n and 606 o may have an approximate total cross-sectional area ranging from about 4000 to 8750 square mils. In a preferred embodiment, the bond pads 606 n and 606 o have an approximate total cross-sectional area ranging from about 5625 to 7050 square mils in order to optimally minimize thermal stresses. The height H₆₀₆ of the bond pads 606 n and 606 o may range, for example, from about 0.1 to 1 micron. In a preferred embodiment, the height H₆₀₆ of the bond pads 606 n and 606 o ranges from about 0.24 to 0.72 microns in order to optimally minimize thermal stresses.

Referring to FIGS. 6T through 6W, in an alternate embodiment, there are one or more resilient couplings 676 and one or more resilient couplings 678. In a preferred embodiment, the resilient couplings 676 are solder preforms preferably having an approximately rectangular cross-sectional shape. The resilient couplings 676 are preferably substantially equal in size and vertically proximate to each other. The resilient couplings 676 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 676 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The length L₆₇₆ of the resilient couplings 676 may range, for example, from about 90 to 120 moils. In a preferred embodiment, the length L₆₇₆ of the resilient couplings 676 ranges from about 101 to 112 mils in order to optimally minimize thermal stresses. The width W₆₇₆ of the resilient couplings 676 may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W₆₇₆ of the resilient couplings 676 ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₆₇₆ of the resilient couplings 676 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₆₇₆ of the resilient couplings 676 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 676 are coupled to the bottom surface 626 of the cavity 616 the package 602 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 676 are coupled to the bond pads 606 using conventional solder equipment and processes. In a preferred embodiment, there is a first resilient coupling 676 a and a second resilient coupling 676 b.

The first resilient coupling 676 a be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 618 the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the first resilient coupling 676 a is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 618 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The first resilient coupling 676 a further includes one or more first bumpers 664 for slidingly supporting the mass 604. In a preferred embodiment, the first bumpers 664 are located on both sides of the first bond pad 606 a In a preferred embodiment, the first bumpers 664 are proximate to the first bond pad 606 a. The width W₆₆₄ of the first bumpers 664 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₆₄ of the first bumpers 664 range from about 3 to 5 mils in order to optimally minimize thermal stresses.

The second resilient coupling 676 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the first wall 618 the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 105 to 145 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the second resilient coupling 676 b is located a perpendicular distance ranging from about 7 to 12 mils from the first wall 618 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a distance ranging from about 112 to 127 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The second resilient coupling 676 b further includes one or more second bumpers 666 for slidingly supporting the mass 604. In a preferred embodiment, the second bumpers 666 are located on one side of the first bond pad 606 a. In a preferred embodiment, the second bumpers 666 are proximate to the first bond pad 606 a. The width W₆₆₆ of the second bumpers 666 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₆₆ of the second bumpers 666 range from about 3 to 5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, the resilient couplings 678 are solder preforms preferably having an approximately rectangular cross-sectional shape. The resilient couplings 678 may be any number of conventional commercially available solder preforms of the type, for example, eutectic or non-eutectic. In a preferred embodiment, the resilient couplings 678 are a eutectic type in order to optimally provide good yield strength with a reasonable melt temperature. The length L₆₇₈ of the resilient couplings 678 may range, for example, from about 90 to 120 mils. In a preferred embodiment, the length L₆₇₈ of the resilient couplings 678 ranges from about 101 to 112 mils in order to optimally minimize thermal stresses. The width W₆₇₈ of the resilient couplings 678 may range, for example, from about 20 to 35 mils. In a preferred embodiment, the width W₆₇₈ of the resilient couplings 676 ranges from about 25 to 30 mils in order to optimally minimize thermal stresses. The height H₆₇₈ of the resilient couplings 678 may range, for example, from about 2 to 4 mils. In a preferred embodiment, the height H₆₇₈ of the resilient couplings 678 ranges from about 2.5 to 3 mils in order to optimally minimize thermal stresses. In a preferred embodiment, the resilient couplings 678 are coupled to the bottom surface 626 of the cavity 616 the package 602 using conventional solder equipment and processes. In a preferred embodiment, the resilient couplings 678 are coupled to the bond pads 606 using conventional solder equipment and processes. In a preferred embodiment, there is a third resilient coupling 678 a and a second resilient coupling 678 b.

The third resilient coupling 678 a may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third wall 622 the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the third resilient coupling 678 a is located a perpendicular distance ranging from about 7 to 12 mils from the third wall 622 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a distance ranging from about 7 to 12 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The third resilient coupling 678 a further includes one or more third bumpers 668 for slidingly supporting the mass 604. In a preferred embodiment, the third bumpers 668 are located on both sides of the second bond pad 606 b In a preferred embodiment, the third bumpers 668 are proximate to the second bond pad 606 b. The width W₆₆₈ of the third bumpers 668 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₆₈ of the third bumpers 668 range from about 3 to 5 mils in order to optimally minimize thermal stresses.

The fourth resilient coupling 678 b may be located a perpendicular distance ranging, for example, from about 5 to 25 mils from the third wall 622 the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 105 to 145 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the fourth resilient coupling 678 b is located a perpendicular distance ranging from about 7 to 12 mils from the third wall 622 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a distance ranging from about 112 to 127 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The fourth resilient coupling 678 b further includes one or more fourth bumpers 670 for slidingly supporting the mass 604. In a preferred embodiment, the fourth bumpers 670 are located on one side of the second bond pad 606 b. In a preferred embodiment, the fourth bumpers 670 are proximate to the second bond pad 606 b. The width W₆₇₀ of the fourth bumpers 670 may range, for example, from about 2 to 6 mils. In a preferred embodiment, the width W₆₇₀ of the fourth bumpers 670 range from about 3 to 5 mils in order to optimally minimize thermal stresses.

Referring to FIGS. 6X through 6BB, in an alternate embodiment, the system 600 further includes one or more sliding supports 660 a, 660 b, 660 c, or 660 d. The sliding supports 660 a, 660 b, 660 c, or 660 d preferably slidingly support the mass 604. The sliding supports 660 a, 660 b, 660 c, or 660 d are preferably coupled to the bottom surface 626 of the cavity 616 of the package 602. The sliding supports 660 a may have an approximately square cross sectional shape. The sliding supports 660 b may have an approximately rectangular cross sectional shape. The sliding supports 660 c may have an approximately triangular cross sectional shape. The sliding supports 660 d may have an approximately circular cross sectional shape. The sliding supports 660 a, 660 b, 660 c, or 660 d may be, for example, tungsten or ceramic. In a preferred embodiment, the sliding supports 660 a, 660 b, 660 c, or 660 d are tungsten order to optimally provide a standard packaging process. The cross-sectional area of one of the sliding supports 660 a, 660 b, 660 c, or 660 d may range, for example, from about 400 to 1600 square mils, individually. In a preferred embodiment, the cross-sectional area of the sliding supports 660 a, 660 b, 660 c, or 660 d ranges from about 625 to 1225 square mils, individually, in order to optimally minimize thermal stresses. The height H₆₆₀ of the sliding supports 660 a, 660 b, 660 c, or 660 d may range, for example, from about 0.5 to 3 mils. In a preferred embodiment, the height H₆₆₀ of the sliding supports 660 a, 660 b, 660 c, or 660 d ranges from about 1 to 1.5 mils in order to optimally minimize thermal stresses.

In a preferred embodiment, there is a first sliding support 660 aa, a second sliding support 660 ab, a third sliding support 660 ac, and a fourth sliding support 660 ad. The first sliding support 660 aa may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 618 of the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the first sliding support 660 aa is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 618 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a perpendicular distance from about 90 to 105 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The second sliding support 660 ab may be located a perpendicular distance ranging, for example, from about 45 to 75 mils from the first wall 618 of the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the second sliding support 660 ab is located a perpendicular distance ranging from about 52 to 62 mils from the first wall 618 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The third sliding support 660 ac may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 618 of the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 15 to 30 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the third sliding support 660 ac is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 618 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 20 to 25 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

The fourth sliding support 660 ad may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the first wall 618 of the cavity 616 of the package 602 and may be located a perpendicular distance ranging, for example, from about 85 to 115 mils from the second wall 620 of the cavity 616 of the package 602. In a preferred embodiment, the fourth sliding support 660 ad is located a perpendicular distance ranging from about 90 to 105 mils from the first wall 618 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses and located a perpendicular distance ranging from about 90 to 105 mils from the second wall 620 of the cavity 616 of the package 602 in order to optimally minimize thermal stresses.

In an alternate embodiment, the resilient couplings 608 may also electrically couple the mass 604 to the package 602.

In an alternate embodiment, the resilient couplings 676 and 678 may also electrically couple the mass 604 to the package 602.

Referring to FIGS. 7A through 7D, in several alternate embodiments, the packages 102, 202, 302, 402, 502 and 602 include one or more pedestals 702 a or 702 b for supporting one or more resilient couplings 108, 150, 208, 260, 308, 363, 408, 470, 508, 566, 568, 608, 676, and 678. The pedestals 702 a and 702 b may be fabricated from, for example, tungsten or ceramic. In a preferred embodiment, the pedestals 702 a and 702 b are fabricated from ceramic. The height H₇₀₂ of the pedestals 702 a and 702 b may range, for example, from about 0 to 10 mils. In a preferred embodiment, the height H₇₀₂ of the pedestals 702 a and 702 b is approximately 5 mils. The pedestal 702 a is preferably a rectangular shaped support pipe. The pedestal 702 a preferably has straight edges. In an alternate embodiment, the pedestal 702 b is a cylindrical section. The pedestal 702 b preferably has tapered sides. In an alternate embodiment, the pedestal 702 b has straight sides. In a preferred embodiment, the pedestals 702 a and 702 b have a shape that optimally minimizes the thermal stresses between the pedestals 702 a and 702 b and the supported resilient couplings 108, 150, 208, 260, 308, 363, 408, 470, 508, 566, 568, 608, 676, and 678.

In several alternate embodiments, the packages 102, 202, 502, and 602, as described above with reference to FIGS. 1A, 2A, 5A, and 6A, include one or more recesses 326, as described above with reference to FIG. 3G, for receiving one or more resilient couplings 108, 208, 308, 408, 508 and 608, as described above with reference to FIGS. 1A, 2A, 3A, 4A, 5A, and 6A.

In several alternate embodiments, splitting the resilient attachment of the mass 104, 204, 304, 404, 504, and 604, as described above with reference to FIGS. 1A, 2A, 3A, 4A, 5A, and 6A, to the package 102, 202, 302, 402, 502, and 602, as described above with reference to FIGS. 1A, 2A, 3A, 4A, 5A, and 6A, reduces the stress from the attachment.

In several alternate embodiments, the resilient couplings 108, 208, 308, 408, 508 and 608, as described above with reference to FIGS. 1A, 2A, 3A, 4A, 5A, and 6A, are split into one or more pieces by splitting solder preform, conductive epoxy, non-conductive epoxy, or glass frit.

In several alternate embodiments, the bond pads 106, 206, 306, 406, 506, and 606, as described above with reference to FIGS. 1A, 2A, 3A, 4A, 5A, and 6A, are split into one or more pieces by splitting the bond pads 106, 206, 306, 406, 506, and 606, as described above with reference to FIGS. 1A, 2A, 3A, 4A, 5A, and 6A, using any conventional splitting method.

In several alternate embodiments, the mass 104, 204, 304, 404, 504, and 604, as described above with reference to FIGS. 1A, 2A, 3A, 4A, 5A, and 6A, may be a micromachined device, an integrated circuit chip, or an optical device.

Although illustrative embodiments of the invention have been shown and described, a wide range of modification, changes and substitution is contemplated in the foregoing disclosure. In some instances, some features of the present invention may be employed without a corresponding use of the other features. Accordingly, it is appropriate that the appended claims be construed broadly and in a manner consistent with the scope of the invention. 

1. An apparatus including thermal stress protection, comprising: a package; a mass coupled to the package, the mass having a surface, the mass further including an active region, wherein the mass comprises at least one of a micro-machined device, an integrated circuit chip, and an optical device; an one or more substantially rigid members for attaching at least one point on the surface to the package to create a resilient coupling between the mass and the package, wherein at least a portion of the active region is spaced apart from the at least one point of attachment.
 2. The apparatus of claim 1, wherein the package comprises; a package including a cavity for receiving the mass.
 3. The apparatus of claim 1, wherein the package comprises: a package including a recess for receiving the rigid member.
 4. The apparatus of claim 1, wherein the mass comprises one or more bond pads for coupling the mass to the package.
 5. The apparatus of claim 4, wherein the bond pads have a cross-sectional shape selected from the group consisting of approximately rectangular, approximately oval, approximately tri-oval, approximately oct-oval, approximately wavy sided rectangular, approximately oct-pie-wedge, approximately hollow oct-pie-wedge, approximately nine-circular, approximately starburst, or approximately sunburst.
 6. The apparatus of claim 4, wherein the mass comprises one or more passive regions; and wherein the bond pads are approximately located in the passive regions.
 7. The apparatus of claim 4, wherein the mass further comprises a first passive region and a second passive region; and wherein the bond pads are located in the first passive region and the second passive region.
 8. The apparatus of claim 7, wherein the first passive region is located at one end of the mass; and wherein the second passive region is located at the opposite end of the mass.
 9. The apparatus of claim 4, wherein the mass further comprises a first passive region integral to the active region; and wherein the bond pads are located in the first passive region.
 10. The apparatus of claim 9, wherein the first passive region is located at one end of the mass; and wherein the active region is located at the opposite end of the mass.
 11. The apparatus of claim 4, wherein the bond pads are approximately located in the active region.
 12. The apparatus of claim 11, wherein the bond pads are located in the approximate center of the active region.
 13. The apparatus of claim 1 wherein the mass includes a passive region located at one end of the mass.
 14. The apparatus of claim 1, wherein the rigid members further electrically couple the mass to the package.
 15. The apparatus of 1, wherein the rigid members have a cross-sectional shape that is approximately rectangular or approximately circular.
 16. The apparatus of claim 1, wherein the rigid members are approximately located at one end of the package.
 17. The apparatus of claim 1, wherein the rigid members are approximately located at the approximate center of the package.
 18. The apparatus of claim 1, wherein there are one or more first rigid members and one or more second rigid members; wherein the first rigid members are approximately located at one end of the package; and wherein the second rigid members are approximately located at the opposite end of the package.
 19. The apparatus of claim 1, wherein the rigid members are a material selected from the group consisting of solder, conductive epoxy, non-conductive epoxy, and glass frit.
 20. The apparatus of claim 1, further comprising one or more sliding supports coupled to the package for slidingly supporting the mass.
 21. The apparatus of claim 20, wherein the sliding supports have a cross-sectional shape selected from the group consisting of approximate square, approximate circle, approximate triangle and approximate rectangle.
 22. The apparatus of claim 1, wherein the package comprises: a package including a pedestal for supporting the rigid members.
 23. An apparatus including thermal stress protection, comprising: a package; a mass coupled to the package, the mass having a surface, the mass further including an active region and a passive region, wherein the mass comprises at least one of a micro-machined device, an integrated circuit chip, and an optical device; and one or more substantially rigid members for attaching at least one point on the surface to the package to create a resilient coupling between the mass and the package, wherein the at least one point of attachment is in the passive region and at least a portion of the active region is spaced apart from the at least one point of attachment.
 24. A method of coupling a mass having an active region and a passive region to a package to reduce effects of thermal stress, wherein the mass comprises at least one of a micro-machined device, an integrated circuit chip, and an optical device, the method comprising: attaching at least one surface point on the mass to the package using one or more substantially rigid members to create a resilient coupling between the mass and the package, wherein the at least one point of attachment is in the passive region and at least a portion of the active region is spaced apart from the at least one point of attachment.
 25. A method of coupling a mass having an active region to a package to reduce effects of thermal stress, wherein the mass comprises at least one of a micro-machined device, an integrated circuit chip, and an optical device, the method comprising: attaching at least one surface point on the mass to the package using one or more substantially rigid members to create a resilient coupling between the mass and the package, wherein at least a portion of the active region is spaced apart from the at least one point of attachment.
 26. The method of claim 25, wherein attaching the mass comprises attaching the mass at a plurality of locations.
 27. The method of claim 25, wherein the mass comprises a passive region, and wherein attaching the mass comprises attaching the passive region to the package.
 28. The method of claim 27, wherein the passive region is located at one end of the mass.
 29. The method of claim 25, wherein attaching the mass comprises attaching the active region to the package.
 30. The method of claim 29, wherein attaching the active region comprises attaching the approximate center of the active region to the package.
 31. The method of claim 25, wherein the mass comprises a first passive region and a second passive region; and wherein attaching the mass comprises attaching the first passive region to the package and attaching the second passive region to the package.
 32. The method of claim 31, wherein the first passive region is located at one end of the mass; and wherein the second passive region is located at an opposite end of the mass.
 33. The method of claim 25, wherein the mass further comprises a passive region integral to the active region; and wherein attaching the mass comprises attaching the passive region to the package.
 34. The method of claim 33, wherein the passive region is at one end of the mass; and wherein the active region is at the opposite end of the mass.
 35. The method of claim 25, wherein attaching the mass comprises permitting the mass to expand and contract without inducing stresses in the mass.
 36. The method of claim 25, wherein attaching the mass comprises providing for expansion and contraction of the package without inducing stresses in the mass.
 37. The method of claim 25, further comprising slidingly supporting the mass at one or more different locations.
 38. The method of claim 37, wherein slidingly supporting the mass comprises slidingly supporting the mass at a plurality of locations.
 39. The method of claim 37, wherein slidingly supporting the mass comprises providing for expansion and contraction without inducing stresses in the package.
 40. The method of claim 25, wherein attaching the mass comprises providing for expansion and contraction without inducing stresses in the package.
 41. The method of claim 25, further comprising electrically coupling the mass to the package at one or more different locations. 